Structure for testing micro-beam breaking strength based on longitudinal comb-tooth-type capacitor

A technology of comb structure and test structure, which is applied in the direction of applying stable tension/pressure to test the strength of materials, measuring devices, using electrical devices, etc., can solve problems such as product differences, and achieve the effect of high sensitivity and simple test structure.

Inactive Publication Date: 2015-04-08
SOUTHEAST UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The mechanical properties of MEMS microstructures processed by different processing technologies, such as silicon body micromachining, silicon surface micromachining, LIGA technology, bonding technology, etc., will have very different mechanical properties. products will also vary

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  • Structure for testing micro-beam breaking strength based on longitudinal comb-tooth-type capacitor

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Embodiment Construction

[0015] A test structure of the fracture strength of a microbeam based on a longitudinal comb-tooth capacitor of the present invention includes a substrate, a bidirectional comb-tooth structure, two identical semi-sealed rectangular structures with a single row of comb-tooths, and a quilt Micrometer beam structure. The two-way comb structure is composed of a bar-shaped anchor area and comb teeth connected to both sides of the anchor area; a row of comb teeth is connected to the outer side of the vertical side of the semi-sealed rectangular structure, and two comb teeth perpendicular to the side The ends of the transverse sides are connected to the sides of the respective anchor areas; the two half-sealed rectangular structures with comb teeth are symmetrically distributed on the left and right sides of the two-way comb structure, and the comb ends are connected with the comb teeth of the two-way comb structure. The comb teeth of the semi-closed rectangular structure are movable...

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Abstract

The invention discloses a structure for testing the micro-beam breaking strength based on a longitudinal comb-tooth-type capacitor. A bidirectional comb-tooth structure is composed of a bar-shaped anchor region and comb teeth connected to two side surfaces of the anchor region, wherein one row of comb teeth is connected to outer side surfaces of vertical edges of self-seal type rectangular structures, tail ends of two transverse edges vertical to the vertical edges are connected to side surfaces of respective anchor regions; the two self-seal type rectangular structures with the comb teeth are symmetrically distributed at the left side and the right side of the bidirectional comb-tooth structure, comb-tooth ends are alternatively opposite to comb teeth of the bidirectional comb-tooth structure, wherein the comb teeth of the self-seal type rectangular structures are movable teeth, the comb teeth of the bidirectional comb-tooth structure are fixed teeth; one end of a to-be-tested micro beam is connected to the middle of the inner side surface of the vertical edge of one self-seal type rectangular structure, the other end of the to-be-tested micro beam is fixed on the side surface of one anchor region, and the other self-seal type rectangular structure without the to-be-tested micro beam is of a reference structure; the self-seal type rectangular structures, the to-be-tested micro beam and the comb teeth are all positioned on the same plane, and are suspended above a substrate in parallel. The structure is high in sensitivity and convenient and feasible.

Description

technical field [0001] The invention relates to the field of testing the breaking strength of a micro-electromechanical system (MEMS), in particular to a testing structure for longitudinal comb-teeth capacitance detection of the breaking strength of the micro-beam. Background technique [0002] MEMS uses the combination of microelectronics technology and micromachining technology to manufacture microsensors, microactuators, microdrivers and microsystems. The mechanical properties of MEMS microstructures processed by different processing technologies, such as silicon body micromachining, silicon surface micromachining, LIGA technology, bonding technology, etc., will have very different mechanical properties. products will also vary. Therefore, for the reliability of MEMES design, processing and application, it is very important to design the test structure and extract the relevant mechanical parameters. Fracture strength is one of the important mechanical properties. The co...

Claims

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Application Information

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IPC IPC(8): G01N3/08G01B7/02
Inventor 唐洁影唐丹王磊
Owner SOUTHEAST UNIV
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