Z-axis positive direction amplifying one-dimensional precise positioning platform

A positive amplification and precise positioning technology, which is applied to the parts of the instrument, instruments, etc., can solve the problems of easy errors, and achieve the effects of avoiding angle errors, large stroke range, and high precision

Active Publication Date: 2015-04-08
SUZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In view of this, the present invention provides a Z-axis positive zoom one-dimensional precision positioning platform to overcome the problem that the existing one-dimensional precision positioning platform is prone to errors in one-dimensional large stroke precision positioning

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  • Z-axis positive direction amplifying one-dimensional precise positioning platform
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  • Z-axis positive direction amplifying one-dimensional precise positioning platform

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Embodiment Construction

[0029] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described The embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0030] Such as figure 1 , 2 As shown, the one-dimensional precise positioning platform 100 for positive Z-axis enlargement of the present invention includes: a base 10 , an enlargement mechanism 20 , a motion platform 30 , piezoelectric ceramics 40 , and a pretension mechanism 50 .

[0031] The amplifying mechanism 20 is used to ampli...

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Abstract

The invention discloses a Z-axis positive direction amplifying one-dimensional precise positioning platform. The positioning platform comprises a base, an amplifying mechanism, a movement platform, piezoelectric ceramic and a pre-tightening mechanism, wherein the amplifying mechanism comprises a flexible arm, a first connecting part, a second connecting part and fixing parts; the fixing parts are arranged at two ends; one side of the movement platform pushes against the first connecting part; a platform bearing surface is formed on the other side of the movement platform; the piezoelectric ceramic is arranged between the first connecting part and the second connecting part; one end of the piezoelectric ceramic pushes against the pre-tightening mechanism; the other end of the piezoelectric ceramic pushes against the fixing parts; the pre-tightening mechanism is arranged in the fixing part at one end and comprises a pre-tightening nut and a steel ball; the steel ball pushes against the piezoelectric ceramic; the pre-tightening nut provides pre-tightening force for the piezoelectric ceramic through the steel ball. The Z-axis positive direction amplifying one-dimensional precise positioning platform provided by the invention has the advantages of large stroke range, high precision, simple structure, small size, high rigidity, high sensitivity, very high resolution, nano level, suitability for serving as a micro-positioning platform and the like.

Description

technical field [0001] The invention relates to the technical field of micro-drive applications, in particular to a Z-axis positive zoom one-dimensional precision positioning platform. Background technique [0002] In recent years, with the rapid development of microelectronics technology, aerospace, bioengineering and other disciplines, human society has officially entered the "submicron-nano" era. In many technical fields such as electronics, optics, and mechanical manufacturing, there is an urgent need for high-precision, high-resolution, and high-reliability micro-positioning systems for high-precision research. Micro-positioning technology will play an increasingly important role in many high-tech fields such as micro-electromechanical systems, nano-manufacturing technology, micro-electronics and nano-electronics technology, and nano-biological engineering, so that it can be used to work directly or cooperate with other instruments and equipment to complete high-precisi...

Claims

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Application Information

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IPC IPC(8): G12B5/00
Inventor 钟博文王振华金子祺陈林森钱哲李宗伟孙立宁
Owner SUZHOU UNIV
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