Solid-state image pickup apparatus, method of manufacturing the same, and electronic apparatus

Abstract

A solid-state image pickup apparatus includes an image pickup pixel and a focus detection pixel. The image pickup pixel includes a micro lens and a photoelectric conversion unit that receives light incident from the micro lens. The focus detection pixel includes the micro lens, the photoelectric conversion unit, and a light shielding unit that shields part of light incident on the photoelectric conversion unit. In the solid-state image pickup apparatus, the micro lens is uniformly formed in the image pickup pixel and the focus detection pixel, and the focus detection pixel further includes a high refractive index film formed under the micro lens.

Description

technical field [0001] The present invention relates to a solid-state imaging device, a manufacturing method of the solid-state imaging device, and electronic equipment, and particularly to a solid-state imaging device capable of optimizing the sensitivity of imaging pixels and the separation characteristics of focus detection pixels, a manufacturing method of the solid-state imaging device, and Electronic equipment. Background technique [0002] A conventionally known solid-state imaging device performs focus detection by a so-called pupil division phase difference system that detects a focus point based on shift amounts of signals output from pairs of focus detection pixels. In a solid-state imaging device, focus detection pixels are provided to a pixel array unit having imaging pixels. [0003] In such a solid-state imaging device, the imaging pixel exhibits the highest sensitivity in the case where there is a light-collecting point of a microlens on the light-receiving ...

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Problems solved by technology

[0006] However, in the structure disclosed in Japanese Patent Application Laid-Open No. 2009-109965, it is not easy to commonly form microlenses for imaging pixels and focus detection pixels

[0007] In addition, in the structure of Japanese Patent Application Laid-Open No. 2007-281296, in the focus detection pixel, since the microlens is higher than the imaging pixel, a shadow is generated in the imaging pixel adjacent to the focus detection pixel, thereby causing deterioration in image quality. deterioration

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