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Semiconductor equipment management system, protocol conversion module thereof and semiconductor equipment management method

A technology for protocol conversion and equipment management, applied in transmission systems, electrical components, program control devices, etc., can solve problems such as inability to communicate directly, and achieve the best performance effect

Active Publication Date: 2015-04-15
WUXI CHINA RESOURCES MICROELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is a problem of inability to communicate directly between the communication application program of the developed semiconductor equipment and the MES

Method used

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  • Semiconductor equipment management system, protocol conversion module thereof and semiconductor equipment management method
  • Semiconductor equipment management system, protocol conversion module thereof and semiconductor equipment management method
  • Semiconductor equipment management system, protocol conversion module thereof and semiconductor equipment management method

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Embodiment Construction

[0025] Further description will be given below in conjunction with the accompanying drawings and embodiments.

[0026] Aiming at the problem that the communication application program of semiconductor equipment cannot communicate directly with MES, a processing module is added between the communication application program and MES, so that the communication application program and MES can communicate, thereby realizing the function of protocol conversion.

[0027] Such as figure 2 Shown is a schematic diagram of the relationship between the host and the semiconductor device. The semiconductor device 10 refers to many devices involved in the semiconductor process, such as a robot arm, a wafer rack, a photolithography machine, etc., which are not listed one by one. In automated production, it is necessary to use automated programs to control these semiconductor devices, which also involves the transmission of control parameters. When a manufacturing execution system is used fo...

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PUM

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Abstract

The invention discloses a protocol conversion module for transmitting communication data of semiconductor equipment between a semiconductor communication module and a manufacturing execution system. Communication consistent with an HSMS protocol is performed between the semiconductor communication module and the semiconductor equipment. The protocol conversion module can be used for loading an engineering file of the semiconductor communication module and calling a dynamic link library file through the manufacturing execution system. The invention further discloses a semiconductor equipment management system using the protocol conversion module and an adaptive semiconductor equipment management method. According to the protocol conversion module and the semiconductor equipment management system and method, the dynamic link library file is taken as a communication bridge between the manufacturing execution system and the semiconductor communication module, so that cooperative communication of semiconductor communication modules having high communication quality is realized on the premise of making slight change on the manufacturing execution system; the advantages of each portion are utilized easily and conveniently; and the optimal performance of the system is realized.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a semiconductor equipment management system, a protocol conversion module of the semiconductor equipment management system and a semiconductor equipment management method. Background technique [0002] With the scale of semiconductor production, the requirements for automation are getting higher and higher, and the Manufacturing Execution System (MES) has emerged as the times require. MES is a management system software used to track production progress, inventory status, work progress and other information flow related to operation management in and out of the workshop, running on the host computer. [0003] MES products include FAB300 from AppliedMaterial, FACTORYworks (acquired from Brooks) and SiView from International Business Machine (IBM). Among them, FACTORYworks is more popular and used more. [0004] When managing semiconductor devices, it is neces...

Claims

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Application Information

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IPC IPC(8): H04L29/06G06F9/445
CPCH04L69/08
Inventor 钱晓燕
Owner WUXI CHINA RESOURCES MICROELECTRONICS
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