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Charged particle radiation device

A technology of charged particle lines and charged particles, applied in circuits, discharge tubes, electrical components, etc., can solve problems such as state changes, damage to biochemical samples and liquid samples, etc.

Inactive Publication Date: 2015-04-15
HITACHI HIGH-TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, biochemical samples, liquid samples, etc. are damaged by the vacuum, or the state changes

Method used

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Examples

Experimental program
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Embodiment 1

[0032] In this embodiment, a basic embodiment will be described. exist figure 1 The diagram of the overall configuration of the charged particle microscope of this embodiment is shown in . figure 1 The charged particle microscope shown in is mainly composed of a charged particle optical column 2, a first case 7 (hereinafter also referred to as a vacuum chamber) supporting the charged particle optical column with respect to the installation surface of the device, and a second case inserted into the first case 7 and used. Two cabinets 121 (hereinafter also referred to as accessories) and a control system for controlling these devices are constituted. When the charged particle microscope is in use, the inside of the charged particle optical column 2 and the first cabinet is evacuated by a vacuum pump 4 . The start and stop actions of the vacuum pump 4 are also controlled by the control system. In the figure, only one vacuum pump 4 is shown, and there may be more than two vacuu...

Embodiment 2

[0064] In this example, other application examples of the charged particle microscope will be described. Furthermore, specific examples of charged particle microscopes include scanning electron microscopes, ion microscopes, and the like. In the following, descriptions of the same parts as those in Embodiment 1 are omitted.

[0065] exist Figure 5 The diagram of the overall configuration of the charged particle microscope of this embodiment is shown in . Similar to Embodiment 1, the charged particle microscope of this embodiment is also composed of a charged particle optical column 2, a first cabinet (vacuum chamber) 7 that supports the charged particle optical column with respect to the installation surface of the device, inserted into the first cabinet 7, and used. The second cabinet (accessory) 121, the control system and the like are formed. The actions and functions of these elements or additional elements added to each element are almost the same as those in Embodimen...

Embodiment 3

[0089] In this example, regarding the Figure 5 A configuration example in which the cover member 122 is removed from the device configuration will be described. In the following, descriptions of the same parts as those in Embodiments 1 and 2 are omitted.

[0090] exist Figure 8 , shows the overall configuration of the charged particle microscope of this embodiment. As for the control system, since it is the same as that of the second embodiment, illustration is omitted, and only important parts of the device are shown.

[0091] exist Figure 8 In the shown structure, the sample workbench 5 is directly fixed on the bottom surface of the second cabinet 121 . The gas supply pipe 100 may also be fixed on the second cabinet 121, or may not be fixed. According to this structure, since the sample is allowed to protrude from the outside of the device, it is possible to observe a sample having a larger size than the structure of Example 2 including the cover member 122 .

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PUM

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Abstract

Conventional charged particle radiation devices assumed that signals were detected while a sample is close to a diaphragm, and thus were not appropriate for observing samples that are extremely uneven in a gas atmosphere having an atmospheric pressure or a pressure that is approximately the same as atmospheric pressure. The present invention is a charged particle radiation device provided with a detachable diaphragm which allows primary charged particle beams to permeate or pass therethrough and which is disposed so as to separate a charged particle optical lens barrel from a space in which a sample is placed, wherein a detector for detecting secondary particles emitted from the sample as a consequence of being irradiated with the primary charged particle beams is disposed within the space in which the sample is placed.

Description

technical field [0001] The present invention relates to a charged particle beam device capable of observing a sample in a gas environment under atmospheric pressure or a predetermined pressure. Background technique [0002] In order to observe a minute region of an object, a scanning electron microscope (SEM), a transmission electron microscope (TEM), and the like are used. Generally, in these devices, the cabinet for placing the sample is evacuated to make the sample environment a vacuum state, and the sample is photographed. However, biochemical samples, liquid samples, and the like are damaged or their states change due to the vacuum. On the other hand, there is a great need to observe such samples with an electron microscope, and in recent years, SEM devices, sample holders, etc. that can observe samples to be observed under atmospheric pressure have been developed. [0003] In principle, these devices set a diaphragm or a tiny through hole that can transmit electron r...

Claims

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Application Information

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IPC IPC(8): H01J37/244H01J37/16H01J37/18H01J37/28
CPCH01J37/244H01J2237/2605H01J37/16H01J37/28H01J37/18H01J37/26H01J2237/164
Inventor 大南佑介佐久间宪之河西晋佐安岛雅彦伊东佑博
Owner HITACHI HIGH-TECH CORP
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