Showering-type wet-process velvet making equipment with solar silicon chips and method

A solar silicon wafer, wet process technology, applied in final product manufacturing, sustainable manufacturing/processing, semiconductor/solid-state device manufacturing, etc. In order to ensure the uniformity of corrosion, balance the concentration of liquid medicine, and improve the degree of production automation

Active Publication Date: 2015-04-22
CHANGZHOU S C EXACT EQUIP
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AI Technical Summary

Problems solved by technology

[0002] In the photovoltaic industry, the wet texturing of silicon wafers generally involves immersing silicon wafers in corrosive liquids for surface treatment. Due to the large amount of corrosive liquids in the reaction zone, the corrosive liquids involved in the reaction and the products after the reaction Doping with the corrosive solution that did not participate in the reaction will cause regional concentration inconsistencies in the concentration of the chemical solution in the reaction tank, which will greatly reduce the uniformity of the surface treatment of the silicon wafer and have a great impact on the quality of the processed silicon wafer

Method used

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  • Showering-type wet-process velvet making equipment with solar silicon chips and method
  • Showering-type wet-process velvet making equipment with solar silicon chips and method

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Embodiment Construction

[0022] In the wet texturing treatment of solar silicon wafers, the silicon wafers are generally immersed in corrosive liquids for surface treatment, and the corrosive liquids participating in the reaction and the products after the reaction are mixed with the corrosive liquids that did not participate in the reaction, resulting in a reaction The concentration of the chemical solution in the tank is inconsistent regionally, which affects the production quality of the silicon wafer. The present invention uses a shower to spray or drop the corrosion solution on the silicon wafer, and the excess chemical solution and reaction products can flow back to the auxiliary tank in time. Avoid the problem of uneven drug concentration on the silicon wafer.

[0023] The shower-type wet texturing equipment for solar silicon chips proposed by the present invention includes: a conveying component, a spraying component and a liquid supply component.

[0024] The conveying assembly includes rolle...

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Abstract

The invention discloses showering-type wet-process velvet making equipment with solar silicon chips. The showering-type wet-process velvet making equipment comprises a conveying component for conveying the silicon chips forwards, a spraying component arranged above the conveying component and a liquid supplying component arranged under the conveying component. The silicon chips are placed on the conveying component at interval, and are conveyed forwards by the conveying component, and a spraying box sprays liquid medicine downwards; and the liquid medicine flowing from the conveying component is polymerized in a liquid receiving groove. The invention also provides a method for carrying out wet-process velvet making by utilizing the showering-type wet-process velvet making equipment. The showering-type wet-process velvet making equipment and method disclosed by the invention have the advantages that corrosive liquid is sprayed or dripped on the silicon chips by a showering mode, and redundant liquid medicine and reaction products flow to the liquid receiving groove, so that the corrosive uniformity of the silicon chips is guaranteed.

Description

technical field [0001] The invention relates to the photovoltaic industry, in particular to a shower-type wet texturing equipment and method for solar silicon wafers. Background technique [0002] In the photovoltaic industry, the wet texturing of silicon wafers generally involves immersing silicon wafers in corrosive liquids for surface treatment. Due to the large amount of corrosive liquids in the reaction zone, the corrosive liquids involved in the reaction and the products after the reaction Doping with the corrosive solution that did not participate in the reaction will cause regional concentration inconsistencies in the concentration of the chemical solution in the reaction tank, which will greatly reduce the uniformity of the surface treatment of the silicon wafer and have a great impact on the quality of the processed silicon wafer . [0003] Therefore, how to provide a shower-type wet texturing equipment and method for solar silicon wafers that can effectively impr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18H01L21/67
CPCH01L31/18H01L31/1876Y02E10/50Y02P70/50
Inventor 左国军
Owner CHANGZHOU S C EXACT EQUIP
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