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Coordinated control method of track and crane for handling system of semiconductor production line

A handling system and production line technology, applied in the direction of transportation and packaging, load hanging components, etc., to achieve the effect of improving the degree of automation and avoiding congestion

Active Publication Date: 2016-08-17
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem of how to make the cooperative action between the crane and the track more safe and effective, the present invention proposes a coordinated control method for the track and the crane for the semiconductor production and handling system, so that the crane can run more effectively and safely. on track

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  • Coordinated control method of track and crane for handling system of semiconductor production line
  • Coordinated control method of track and crane for handling system of semiconductor production line

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Embodiment Construction

[0019] The present invention will be further described in detail below with reference to the drawings and embodiments.

[0020] See attached figure 1 , Is the system control flowchart of the present invention. A method for coordinated control of track and crane for semiconductor production line handling system, including the following steps:

[0021] The track on which the crane runs consists of straight rails, curved rails, switch rails, and temporary material storage areas. The straight rails and switch rails are affixed with barcodes that can determine the position of the crane in the track; the track laying is divided into regional tracks and sections Track (in-area track is an area composed of closed track connections, and processing equipment is placed within the scope of the track in the area to determine the processing area of ​​a certain process or process; the inter-area track connects the independent regional tracks together When the material needs to be transported fro...

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Abstract

The invention relates to a semiconductor production line handling system oriented track and crown block coordination control method. A crown block is provided with a signal transceiver, and a track connected with each branch of a turnout is provided with light transmitting / receiving devices; a programmable logic controller acquires signals of the light transmitting / receiving devices according to a light communication controller so as to control the running of a crown block. The semiconductor production line handling system oriented track and crown block coordination control method comprises the following steps: a server determines key points needing passing in a path according to the planned running path of the crown block, downloads the key point information of the path to the crown block, and monitors the running position and the running state of the crown block in the track according to the state of a forked track. According to the method, light communication devices are installed on the track before entering the turnout and the crown block, and are matched with the programmable logic controller, so that before the crown block enters the turnout, the conversion of the track is completed, and further, the crown block in running in the track is relatively safe and reliable; due to the use of a temporary storage region of the crown block, possible jam caused by multi-crown block scheduling can be prevented, and the automation of the handling system is improved greatly.

Description

Technical field [0001] The invention relates to a crane scheduling method for semiconductor production lines, in particular to a coordinated control method between the crane and the track. Background technique [0002] In the processing and production of semiconductor products, the processing process of the product is complex. Some products require dozens of procedures to complete, and some products may require hundreds of processing procedures to complete. Some of these procedures correspond to different machines and equipment. The same, but the processing period is different. Due to restrictions on process requirements and site conditions, machines and equipment may be distributed in the location of the factory. The rapid and effective handling of processed materials can improve the production efficiency of the enterprise. In the semiconductor processing and production, manual or manual operation of mechanical equipment for handling is a labor-consuming and time-consuming meth...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B66C13/48
CPCB66C13/48
Inventor 刘明哲徐皑冬金妮王晨曦
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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