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Visualized automatic blank-jumping wafer picking machine and operating method thereof

A technology for picking grain machines and wafers, which is applied in the field of visual automatic air-hopping wafer picking machines, which can solve problems such as efficiency impact, inconvenience, and tediousness, and achieve the effects of saving wasted time, high efficiency, and automation and convenience

Active Publication Date: 2015-04-29
豪威半导体(太仓)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When a chip is missing during the picking process, the general method is to use tweezers to manually pick up the chip from the chip to the missing place, and forcibly fill in the coordinate position of the chip; for the missing part of the chip with more missing parts, it is necessary to perform software elimination points to complete. , extremely cumbersome
These methods are difficult to guarantee continuity, very inconvenient, and the efficiency is directly affected

Method used

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  • Visualized automatic blank-jumping wafer picking machine and operating method thereof
  • Visualized automatic blank-jumping wafer picking machine and operating method thereof

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Embodiment Construction

[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0029] Such as figure 1 with 2 As described above, a visual automatic air-hopping wafer picker provided by the present invention includes a discharge test system, a bonding system, and a wafer test system. The discharge test system is connected to the wafer test system through the bonding system, wherein: The material testing system includes a Tray disc PR projection mechanism 1, a first light metering auxiliary lamp 2, and a Tray disc workbench 3. The Tray disc PR projection mechanism 1 is electrically connected to the Tray disc workbench 3; the joint system includes a mechanical arm 11, a soleno...

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Abstract

The invention relates to a visualized automatic blank-jumping wafer picking machine. The visualized automatic blank-jumping wafer picking machine comprises a feeding testing system, a bonding system and a wafer testing system, wherein the feeding testing system comprises a Tray PR projection mechanism, a first photometry auxiliary lamp and a Tray workbench; the bonding system comprises a mechanical arm, a solenoid valve vacuum blowing and suction pipe and a swing arm motor; the wafer testing system comprises an ion gun, a water PR projection mechanism, a second photometry auxiliary lamp, a wafer, a wafer workbench, an inner-ring fixing ring, a center assembly, an XY lead screw and a motor. The visualized automatic blank-jumping wafer picking machine can achieve automatic blank-jumping when a wafer chip lacks, the functions of equipment of a manufacturer are changed, new functions are created, and the wafer picking machine achieves automation and is more convenient to use and high in efficiency. The wafer picking machine saves the time wasted due to lack, blank lines and line breaking of wafers, manual clamping through tweezers is not needed, the equipment does not need to be shut down to complete actions which the equipment can not complete, and the cumbersome trouble of point elimination and point supplement is avoided.

Description

technical field [0001] The present invention relates to the field of automation equipment, and more specifically, relates to a visual automatic air-jump wafer picker in which a manual mode is changed to an automatic idle-jump mode. At the same time, the present invention also relates to an operation method of the picker. Background technique [0002] When the existing visual wafer picking machine is picking grains, the wafers enter the customer's production line after OEM processing, which will change with the process of the process, resulting in blank lines and missing wafers, while the existing equipment It only recognizes complete wafer chips, and does not have the function of skipping incomplete wafer chips, so it will be subject to many limitations when picking grains. When a chip is missing during the picking process, the general method is to use tweezers to manually pick up the chip from the chip to the missing place, and forcibly fill in the coordinate position of th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/66
CPCH01L21/67271H01L22/26
Inventor 杨会泉
Owner 豪威半导体(太仓)有限公司