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Shape variable mirror and laser processing device

A laser processing and variable technology, used in lasers, laser welding equipment, laser parts and other directions to achieve the effect of astigmatism correction

Active Publication Date: 2017-07-14
MITSUBISHI ELECTRIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the above-mentioned structure, for example, in an environment where a glass disc substrate is used for the mirror and an adhesive material cannot be used, force can only be applied from the back side of the mirror in a pressing direction, and it is difficult to deform the mirror as desired. shape

Method used

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  • Shape variable mirror and laser processing device
  • Shape variable mirror and laser processing device
  • Shape variable mirror and laser processing device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0033] Figure 1 ~ Figure 3 To describe the configuration of the shape variable mirror according to Embodiment 1 of the present invention, figure 1 is a diagram showing the concept of changing the shape of the shape variable mirror by applying a load to the mirror, figure 2 It is a cross-sectional view of the shape variable mirror along a plane (XZ plane) perpendicular to the reflection surface, image 3 For explaining the structure of the shape variable mirror, it is an assembly diagram showing a state in which each component is separated.

[0034] Before describing the specific structure of the shape variable mirror according to Embodiment 1 of the present invention, using figure 1 The concept of changing the shape of a mirror is explained.

[0035] The reflection mirror 1 is a thin plate-shaped disk having planes parallel to each other, and the reflection surface 1sf and the back surface 1sb which reflect light are circular. An X-axis is defined on the mirror surface...

Embodiment approach 2

[0062] The shape variable mirror according to Embodiment 2 is configured by adding a lock mechanism to the deformation amount adjusting portion and constituting the pressing member by two members, compared to the shape variable mirror according to Embodiment 1. Figure 4 with Figure 5 To describe the configuration of the shape variable mirror according to Embodiment 2 of the present invention, Figure 4 It is a sectional view of a plane (XZ plane) perpendicular to the reflection surface of the shape variable mirror, Figure 5 For explaining the structure of the shape variable mirror, it is an assembly diagram showing a state in which each component is separated. In the drawings, the same reference numerals are assigned to the same components as those described in Embodiment 1 above. In addition, in this Embodiment 2, the method used in Embodiment 1 is also referred to figure 1 .

[0063] In the shape variable mirror 10 according to Embodiment 2, also on the back surface ...

Embodiment approach 3

[0092] The shape variable mirror according to Embodiment 3 is configured such that, compared to the shape variable mirror according to Embodiment 2, a rotation restricting mechanism is provided for the screw member so that the screw does not rotate beyond a set value. Image 6 For describing the structure of the shape variable mirror according to Embodiment 3 of the present invention, it is a sectional view of a plane (XZ plane) perpendicular to the reflection surface of the shape variable mirror. In the drawings, the same components as those described in Embodiment 1 or 2 are assigned the same reference numerals, and detailed description thereof will be omitted. In addition, the third embodiment also refers to the method used in the first embodiment figure 1 and used in Embodiment 2 Figure 5 .

[0093] In the shape variable mirror 10 according to Embodiment 3, as Image 6 As shown, the structure of the screw member 2 is different from that of Embodiment 1 or 2 described ...

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PUM

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Abstract

Provided are a shape variable mirror and a laser processing apparatus which is not restrained by adhesion of a reflector, and can correct astigmatism, comprising a first press component which can press two opposite components (Pxf) on the periphery of a reflector (1sf) of a reflector (1); a second press component which can press two opposite components (Pyb) on the back (1sb) of the reflector (1); and a shape variable amount adjusting part (4) which locate a position of the second press component relative to a spool of the first press component according to a position of a press reflection surface (1sf) of the first press component and a position of a pres back (1sb) of the second press component which pass through a central axis of the reflection surface (1sf) to be different positions, and change intervals between the first press component and the second press component in an axial direction to adjust shape variable amount of the reflector (1) caused by press.

Description

technical field [0001] The present invention relates to a shape variable mirror for correcting wavefront distortion of light waves such as laser beams, especially astigmatism, and a laser processing device using the shape variable mirror. Background technique [0002] Shape variable mirrors correct the wavefront distortion of light waves and are used in various optical products. For example, in an astronomical telescope, it is used to correct distortion (aberration) of a wavefront caused by atmospheric motion and the like to improve image quality (for example, refer to the second half of Patent Document 1). In addition, in optical pickups such as CDs and DVDs, it is used to correct aberrations caused by inclination, waviness, etc. of the surface of the optical disc (for example, refer to Patent Document 2). And, in the laser processing machine, it is used to correct the wavefront distortion of the laser beam caused by the deformation of the lens, reflecting mirror, etc., to...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/10
CPCB23K26/00B23K26/043B23K26/38G02B5/08G02B5/09H01S3/101
Inventor 石塚智彦小林信高泷川靖弘
Owner MITSUBISHI ELECTRIC CORP