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Full-interdigital electrode micro-piezoelectric thick film vibration energy collector and manufacturing method thereof

A technology of vibration energy collection and full interdigitation, which is applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electrical components, etc., to achieve simple device structure, large voltage adjustment range, and broad market The effect of applying the foreground

Inactive Publication Date: 2015-06-24
DALIAN UNIV OF TECH
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Problems solved by technology

But the surface interdigitated electrodes are on the same surface, and the bending electric field can only polarize the shallow piezoelectric material, so the d of the surface interdigitated electrodes 33 mode only applies to thin-film material energy harvesters

Method used

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  • Full-interdigital electrode micro-piezoelectric thick film vibration energy collector and manufacturing method thereof
  • Full-interdigital electrode micro-piezoelectric thick film vibration energy collector and manufacturing method thereof
  • Full-interdigital electrode micro-piezoelectric thick film vibration energy collector and manufacturing method thereof

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Embodiment Construction

[0032] The miniature piezoelectric thick-film vibration energy harvester provided by the invention is mainly used for collecting vibration energy in the environment. The cantilever beam structure is used to obtain vibration energy, and then the vibration energy is converted into electrical energy through the piezoelectric effect, which is used to power low-power devices such as wireless sensor node units. The present invention will be further described below in conjunction with the accompanying drawings, which are explanations of the present invention rather than limitations.

[0033] Such as figure 1 Shown: a miniature piezoelectric thick film vibration energy harvester with all interdigitated electrodes, including a flexible substrate 1; the insulating layer 2 is located on the flexible substrate 1; on the insulating layer 2, photoresist 3 is used to Engraving and patterning a window in the shape of an interdigitated electrode; using magnetron sputtering to prepare a Ti met...

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Abstract

The invention provides a full-interdigital electrode micro-piezoelectric thick film vibration energy collector and a manufacturing method thereof. The full-interdigital electrode micro-piezoelectric thick film vibration energy collector comprises a piezoelectric cantilever beam and a mass block; the piezoelectric cantilever beam comprises a flexible substrate, an insulation layer, a interdigital electrode posts and a piezoelectric layer; the flexible substrate is stainless steel; the piezoelectric layer is of a PZT (piezoelectric transition) piezoelectric thick film material; the interdigital electrode posts penetrate all the way to the upper surface of the substrate from the surface of a piezoelectric material, the piezoelectric material can be fully polarized, and the problem about incomplete polarization of materials in surface interdigital electrode d33 mode energy collector is avoided. The energy collector is long in service life, large in high-voltage regulation range and capable of powering wireless sensor nodes and medical equipment.

Description

technical field [0001] The invention relates to a miniature piezoelectric vibration energy collector and a manufacturing method thereof, in particular to a miniature piezoelectric thick-film vibration energy collector with full interdigital electrodes and a manufacturing method thereof. Background technique [0002] The rapid development of MEMS devices and nanoelectronic devices has put forward a great demand for ultra-low power power supply, which has given birth to the research of energy harvesting technology. At present, there are mainly three types of vibration energy harvesting technologies: piezoelectric, electromagnetic and electrostatic. Among them, the piezoelectric type has attracted attention because of its compact structure, high conversion efficiency, and no need to start the power supply. However, the design of the micro piezoelectric energy harvester requires Address two key issues: [0003] 1. Choice of flexible substrate. The flexible substrate of the min...

Claims

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Application Information

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IPC IPC(8): H02N2/18
Inventor 杨淑董维杰王大志殷小林
Owner DALIAN UNIV OF TECH
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