A wide-spectrum and large-field-of-view projection objective lens
A technology of projection objective lens and large field of view, which is applied in the field of projection objective lens, can solve the problems of difficult design and manufacture of projection objective lens, few precedents, etc., and achieve the effects of high manufacturing difficulty, reduced processing, and reduced manufacturing cost and difficulty
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Embodiment 1
[0037] see figure 1 , which is a schematic structural diagram of the projection objective lens with wide spectrum and large field of view provided in Embodiment 1 of the present invention. The projection objective lens with wide spectrum and large field of view sequentially includes a first lens group G1, an equivalent parallel plate PLATE, a second lens group G2, and a third lens group G3 from the object side P1 to the image side P2. An aperture AS is provided in the second mirror group G2, and the aperture size of the aperture AS can be adjusted, and an aperture aperture with an adjustable aperture size can be used. The equivalent parallel plate PLATE is located between the object side P1 and the image side P2.
[0038] From the object side P1 to the image side P2, the first lens group G1 may sequentially include a first lens L1, a second lens L2, a third lens L3, and a fourth lens L4. The second lens group G2 may include at least two lenses with negative power and at leas...
Embodiment 2
[0059] see Figure 5 , which is a structural schematic diagram of the wide-spectrum and large-field-of-view projection objective lens provided by Embodiment 2 of the present invention. The wide-spectrum and large-field-of-view projection objective includes a first mirror group G1, a second mirror group G2, and a third mirror group G3 in sequence from the object side P1 to the image side P2. An aperture AS is provided in the second mirror group G2, and the aperture size of the aperture AS can be adjusted, and an aperture aperture with an adjustable aperture size can be used.
[0060] From the object side P1 to the image side P2, the first lens group G1 may sequentially include the first lens L1, the second lens L2, the third lens L3, and the fourth lens L4; the second lens group G2 may sequentially include the fifth lens L5, The sixth lens L6, the seventh lens L7, the eighth lens L8, the ninth lens L9, the tenth lens L10, and the eleventh lens L11; the third lens group G3 may ...
Embodiment 3
[0079] see Figure 8 , which is a structural schematic diagram of the wide-spectrum and large-field-of-view projection objective lens provided in Embodiment 3 of the present invention. The wide-spectrum and large-field-of-view projection objective includes a first mirror group G1, a second mirror group G2, and a third mirror group G3 in sequence from the object side P1 to the image side P2. An aperture AS is provided in the second mirror group G2, and the aperture size of the aperture AS can be adjusted, and an aperture aperture with an adjustable aperture size can be used.
[0080] From the object side P1 to the image side P2, the first lens group G1 may sequentially include a first lens L1, a second lens L2, a third lens L3, and a fourth lens L4. The second lens group G2 may include at least two lenses with negative power and at least one of them is a biconcave lens; it may also include at least three lenses with positive power and at least two of them are biconvex lenses. ...
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