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MEMS Gas Sensing Device

A sensing device, micro-electromechanical technology, applied in the direction of measuring device, analysis of gas mixture, gas analyzer structure details, etc., can solve the problems of bulky, complex instrument structure, high power consumption, etc.

Inactive Publication Date: 2018-03-09
SENSOR TEK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Although the gas analysis equipment used in general chemical laboratories and quality control inspection rooms has the advantages of high accuracy, high sensitivity and low detection limit, etc., they are bulky, not easy to carry, high power consumption, complicated instrument structure and expensive Expensive and other disadvantages, so it is greatly limited in application

Method used

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  • MEMS Gas Sensing Device
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Experimental program
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Embodiment Construction

[0045] Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:

[0046] Please refer to figure 1 , which is a schematic diagram of the MEMS gas sensing device of the present invention. The MEMS gas sensing device 100 includes a substrate 110 , an oxide layer 120 , a heating unit 130 , a thermally conductive metal layer 140 , a passivation layer 160 , a sensing unit layer 170 and a circuit element 180 .

[0047] The substrate 110 has a first cavity 111 . In this embodiment, the first cavity 111 may be formed through a semiconductor process, such as dry etching. Moreover, after the first cavity 111 is formed, the first cavity 111 will divide the substrate 110 into sub-substrates 112 and 113 , that is, the first cavity 111 is located between the sub-substrates 112 and 113 .

[0048] The oxide layer 120 has a first surface 121 and a second surface 122 opposite to the first surface. The oxid...

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Abstract

A micro-electromechanical gas sensing device includes a substrate, an oxide layer, a heating unit, a heat-conducting metal layer, a passivation layer and a sensing unit layer. The substrate has a first cavity. The oxide layer has a first surface and a second surface opposite to the first surface. The oxide layer is disposed on the substrate and covers the first cavity, and the first surface is in contact with the substrate. The heating unit is disposed in the oxide layer and adjacent to the first surface of the oxide layer. The heat conducting metal layer is disposed between the heating unit and the second surface of the oxide layer. The passivation layer is disposed on the second surface of the oxide layer and has at least one hole. The sensing unit layer is disposed on the passivation layer and is electrically connected to the heat-conducting metal layer through at least one hole.

Description

technical field [0001] The invention relates to a gas sensing device, in particular to a microelectromechanical gas sensing device. Background technique [0002] Generally speaking, gas detection has a wide range of applications in the fields of environmental monitoring, household alarms, chemical control, and greenhouse environment control. Toxic gases that are colorless and odorless, such as carbon monoxide (CO), cannot be detected by human sight and smell. When the content of toxic gas in the air exceeds a certain range, the human body will produce symptoms ranging from headache, dizziness, and vomiting to severe shock and death. If there is a gas analysis instrument or device, real-time monitoring of the gas composition in a confined space or a poorly ventilated environment will be able to sound an alarm in time when the concentration of toxic gas exceeds the allowable range of human beings to prevent misfortune and disasters. [0003] Although the gas analysis equipm...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/00
CPCG01N33/004
Inventor 刘茂诚赵晧名周文介吕柏纬翁淑怡王竣傑
Owner SENSOR TEK