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A planar low-power microwave microplasma linear array source

A micro-plasma and linear array technology, applied in the direction of plasma, electrical components, etc., can solve the problems of uneven distribution of plasma and high cost of power source, and achieve the effect of low cost, low input power and low cost

Inactive Publication Date: 2018-02-23
EAST CHINA NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Due to the structure of the array source, its resonant frequency will change with the number of units and the coupling mode, resulting in high cost of the power source, and the excited plasma distribution is not uniform

Method used

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  • A planar low-power microwave microplasma linear array source
  • A planar low-power microwave microplasma linear array source
  • A planar low-power microwave microplasma linear array source

Examples

Experimental program
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Embodiment

[0041] Such as Figure 1 to Figure 3 As shown, the planar low-power microwave microplasma linear array source in this embodiment includes a quarter-wavelength microstrip transmission line array 1 , a coupling strip 10 , a grounding conductive strip 20 and a feeding conductive strip 30 . During operation, the microwave power is fed into the feed conduction strip 30 of the planar microwave microplasma linear array source through the SMA coaxial joint 5 and the SMA coaxial joint 6, and the feed conduction strip 30 is connected through the second ground point 33, and the microstrip transmission line The first grounding point 2 on the array 1 is connected to the grounding plate 7, and the two ends pass through the equivalent open circuit of the three-quarter waveguide wavelength microstrip transmission line, and the position of the third grounding point 22 on the grounding conductor strip 20 is adjusted so that the The voltage is the largest (equivalent to a voltage antinode); thro...

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Abstract

The invention discloses a planar low-power microwave micro-plasma linear array source, which includes a microstrip transmission line array, a coupling bar, a grounding conductive strip and a feeding conductive strip; wherein, the microstrip transmission line array is connected to the grounding plate, and one end of the array is open, and the The ground conduction strip forms a gap; the microwave power is input through the central feed conduction strip, and the array elements on both sides of the feed conduction strip are respectively connected by coupling strips, and the feed conduction strip is not connected to the coupling strip. When working, the low-power microwave is input through the double feeding point, and the planar microwave micro-plasma linear array is excited at the gap. The invention has the advantages of low cost, small input power, uniform excitation of the micro-plasma bilinear array, and the like.

Description

technical field [0001] The invention relates to the technical field of microwave plasma sources, in particular to a 2.45GHz planar low-power microwave micro-plasma linear array source based on a microstrip transmission line. Background technique [0002] Low-power microwave micro-plasma technology is a high-tech developed in recent years that integrates microelectronics technology, microwave technology and plasma technology. It develops along with the development of MEMS technology. Micro plasmas include direct current micro plasmas, radio frequency micro plasmas and microwave micro plasmas. When the discharge space is further reduced to a nanometer size, it becomes a nanoplasma. Because microelectromechanical systems (MEMS) have the characteristics of low loss, high isolation, small size, low manufacturing cost, and easy integration with IC and MMIC circuits, low-power packaging and active integration of microwave plasma can be realized through MEMS technology. Therefore,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H1/46
Inventor 廖斌权威
Owner EAST CHINA NORMAL UNIV