A vacuum evaporation equipment

Abstract

The invention relates to the field of evaporation technology and discloses a vacuum evaporation equipment, which includes a shell. The shell forms a main vacuum chamber and a side vacuum chamber. The side vacuum chamber is provided with a fault detection module for scanning a crucible to be measured, a pick-and-place main The manipulator of the crucible in the vacuum chamber is a switch component installed between the main vacuum chamber and the side vacuum chamber. When the switch component is opened, it connects the main vacuum chamber and the side vacuum chamber for crucible pick-up, placement and detection. When it is closed, it isolates the main vacuum chamber and the side vacuum chamber. cavity. The above-mentioned vacuum evaporation equipment can conduct online detection of the crucible without destroying the vacuum degree in the main vacuum chamber, and can detect the crucible through the fault detection module to determine whether there are micro-cracks in the detected crucible, and the detection of the crucible The accuracy is higher. The above-mentioned vacuum evaporation equipment can maximize the service life of each crucible, extend the time interval for replacing crucibles in actual production, reduce production preparation time, and thereby reduce production costs.

Description

Technical field [0001] The invention relates to the technical field of vapor deposition, in particular to a vacuum vapor deposition equipment. Background technique [0002] At present, in the preparation process of bottom-emission OLED, the preparation of the metal cathode needs to be carried out in a vacuum evaporation equipment. In the vacuum evaporation equipment, a crucible is used to hold the metal material to be evaporated. For example, the material of the metal cathode in OLED is generally selected Aluminum material. [0003] In the process of vacuum evaporation to form the metal cathode of OLED, the molten aluminum has the characteristics of wetting the crucible. During the evaporation process, the molten aluminum easily crawls along the crucible wall and overflows the crucible, which leads to easy solidification of aluminum during cooling. The crucible and nearby objects are adhered to each other to cause damage to the crucible; and the process temperature in the environm...

AI Technical Summary

Problems solved by technology

After the crucible is fired, the vacuum chamber is generally opened before refilling the material to ensure that there are no cracks, so that the crucible is exposed to the atmosphere for manual visual confirmation, resulting in frequent switching between the high temperature and low temperature states of the crucible. , which increases the risk of microcracks in the crucible; and, in the above-mentioned method of confirming whether microcracks have occurred in the crucible, the accuracy of human visual inspection is low, and the probability of error is high, which leads to a conservative estimate of the life of the crucible, and replacement in actual production Shorter time intervals for crucibles increase production lead time and increase production costs

Images