An air cooling device for high heat light source

An air-cooling device and air-cooling technology, applied in lighting devices, components of lighting devices, cooling/heating devices of lighting devices, etc., can solve problems such as lowering system performance, increasing system risk, and difficulty in completely eliminating vibration, and achieving Improve system performance, reduce system risk, save procurement and maintenance costs
CN104848162BActive Publication Date: 2017-01-11RAINTREE SCI INSTR SHANGHAI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
RAINTREE SCI INSTR SHANGHAI
Publication Date
2017-01-11

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Abstract

The invention provides an air cooling device for a high-heat light source. The air cooling device comprises an air cooling cavity component, a lamp housing component and an air guide shunt component. The air cooling cavity component comprises an air inlet cavity, an air outlet cavity and an air cooling cavity for connecting the air inlet cavity with the air outlet cavity; and a light outlet window is formed in the bottom of the air cooling cavity. The lamp housing component is positioned in the air cooling cavity of the air cooling cavity component, and is provided with a lamp housing shell. The air guide shunt component comprises a current limiting plate, an air guide pipe and an air diffusion sleeve. Compressed cooling air from a factory compressed air system enters the air cooling cavity from the air inlet cavity through the air diffusion sleeve and the air guide pipe, takes away the heat generated by an adjustable light source from the periphery of the lamp housing component through the current limiting plate, and is discharged from the air outlet cavity. The air cooling device uses the clean compressed air provided by the factory compressed air system, so that the purchase and maintenance cost of a cooling fan is saved, and the system risk is reduced.
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Description

technical field

[0001] The invention relates to an air-cooling device for a high-calorie light source, which is suitable for various precision measurement or precision processing equipment, especially for semiconductor large-scale integrated circuit manufacturing and measurement equipment. Background technique

[0002] The light source in optical equipment often has a high calorific value, and the precision measurement system itself is relatively sensitive to temperature changes, so it has high requirements for the thermal stability of the environment inside the equipment, so the heat should be discharged from the system, and it must be ensured The reliability of the system; on the other hand, as part of the measurement system, the light source often needs to be precisely adjusted and positioned relative to other parts of the optical path, and minimize vibration and shock.

[0003] The usual liquid cooling system is prone to clogging and leakage due to reasons such as sealin...

Claims

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