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Method for forming transparent conductive film, and device for heating and drying thin-film

A transparent conductive film, heating and drying technology, applied to the device for coating liquid on the surface, the conductive layer on the insulating carrier, the circuit, etc., can solve the problems of easy bending, high manufacturing cost, difficult to apply the film, etc., to improve the conductivity sexual effect

Inactive Publication Date: 2015-08-19
TORAY ENG CO LTD
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  • Description
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  • Application Information

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Problems solved by technology

ITO formed by this sputtering method has the problem of being difficult to apply to films and the like due to its high manufacturing cost and its tendency to bend.

Method used

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  • Method for forming transparent conductive film, and device for heating and drying thin-film
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  • Method for forming transparent conductive film, and device for heating and drying thin-film

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Embodiment Construction

[0033] Next, an embodiment of the film heating and drying apparatus 1 of the present invention will be described. here, figure 1 It is a schematic diagram showing the open state of the chamber of the film heating and drying apparatus 1 in this embodiment, figure 2 It is a schematic diagram showing the closed state of the chamber of the film heating and drying apparatus 1 .

[0034] Such as figure 1 , figure 2 As shown, the thin film heating and drying apparatus 1 is an apparatus that dries the coating film C formed on the substrate W to be processed to form a transparent conductive film used in liquid crystals, organic EL, solar cells, and the like. That is, it is a device that applies a coating material obtained by dispersing a conductive polymer material of polyethylenedioxythiophene / polystyrene sulfonic acid (PEDOT / PSS) in water, so that the substrate to be treated A coating film C is formed above, and the coating film C is dried.

[0035] The film heating and dryi...

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Abstract

The invention provides a method for forming a transparent conductive film and a device for heating and drying a thin film. Specifically, the invention provides a transparent conductive film forming method improving conductivity when forming a transparent conductive film through PEDOT / PSS and a transparent conductive film (thin film) drying device. The transparent conductive film forming method comprises the following steps of coating the coating materials acquired through conductive high polymer materials including PEDOT and PSS and contained in water as a solvent to a processed substrate to form a coating film; and heating and drying the coating film inside a chamber so as to form a transparent conductive film on the processed substrate. In the forming method, the heating drying operations are performed in the following way. While the drying temperature greater than the boiling point of the solvent is kept, the drying delay operations for preventing the coating film solvent from being evaporated inside the chamber is performed before the drying facilitating operations facilitating the solvent evaporation.

Description

technical field [0001] The present invention relates to a method for forming a transparent conductive film used in liquid crystals, organic EL (organic electroluminescence), flat panel displays, solar cells, etc., and a film heating and drying device. Background technique [0002] Transparent conductive films are thin films that have both visible light transmission and conductivity, and are used as transparent electrodes for liquid crystals, organic EL (organic electroluminescence), flat panel displays, solar cells, and the like. The transparent conductive film uses indium oxide-based or tin oxide-based ITO, and is generally formed by a sputtering method. ITO formed by this sputtering method has a problem that it is difficult to apply it to a film or the like because of its high manufacturing cost and its tendency to bend. [0003] As a material for solving this problem, in recent years, a conductive polymer material of polyethylenedioxythiophene / polystyrenesulfonic acid (c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01B5/14H01B13/30
CPCB05D1/26B05D3/0254B05D7/24
Inventor 内潟外茂夫山下元气奥田大辅
Owner TORAY ENG CO LTD
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