Piezoelectric driving multi-ring gyroscope with fixed outer edge and preparation method of piezoelectric driving multi-ring gyroscope

A piezoelectric driven, fixed technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, measurement device, etc., can solve the problems of unsuitability for mass production, difficult control of process errors, complex gyro processing technology, etc. , to achieve the effect of simple processing steps, convenient installation and portability, and miniaturization.

Active Publication Date: 2015-09-09
SHANGHAI JIAO TONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] This technology has the following disadvantages: the hemispherical resonant gyroscope is difficult to process because it involves spherical processing, and the process error is difficult to control; the cavity of the hemispherical resonator is obtained by etching, and the sphericity is not high enough, and the sphericity of the hemispherical resonator largely depends on the hemisphere The

Method used

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  • Piezoelectric driving multi-ring gyroscope with fixed outer edge and preparation method of piezoelectric driving multi-ring gyroscope
  • Piezoelectric driving multi-ring gyroscope with fixed outer edge and preparation method of piezoelectric driving multi-ring gyroscope
  • Piezoelectric driving multi-ring gyroscope with fixed outer edge and preparation method of piezoelectric driving multi-ring gyroscope

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Embodiment 1

[0060] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0061] Such as Figure 1A , 1B As shown, the present embodiment provides an outer edge fixed piezoelectric driven multi-ring gyroscope, comprising:

[0062] a multi-ring resonator1 containing five to eight rings;

[0063] A fixed chute 2 supporting the multi-ring resonator;

[0064] Four to seven groups of spokes 3 located between two adjacent rings of the multi-ring resonator are used to connect rings and rings of the multi-ring resonator, and the positions of adjacent two groups of spokes have...

Embodiment 2

[0087] Embodiment 2 is similar to Embodiment 1, except that the discrete electrodes in Embodiment 2 are arranged on the upper surface of the multi-ring resonator.

[0088] Such as Figure 7 As shown, the present embodiment provides an outer edge fixed piezoelectric driven multi-ring gyroscope, including:

[0089] a multi-ring resonator1 containing five to eight rings;

[0090] A fixed chute 2 supporting the multi-ring resonator;

[0091] Four to seven groups of spokes 3 located between two adjacent rings of the multi-ring resonator are used to connect rings and rings of the multi-ring resonator, and the positions of adjacent two groups of spokes have an angle difference;

[0092] Discrete electrodes 8 located on the upper surface of the multi-ring resonator 1 .

[0093] Wherein, the multi-ring resonator 1 , the fixed chute 2 , and the spokes 3 have similar features to those in Embodiment 1, except that the discrete electrodes 8 are attached to the upper surface of the multi...

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Abstract

The invention provides a piezoelectric driving multi-ring gyroscope with fixed outer edge and a preparation method of the piezoelectric driving multi-ring gyroscope. The piezoelectric driving multi-ring gyroscope comprises a multi-ring resonator with 5-8 rings, a fixed chute for supporting the multi-ring resonator, a plurality of groups of spokes arranged between every two adjacent rings of the multi-ring resonator and used for connecting the rings of the multi-ring resonator, a dispersed electrode positioned on the surface of the inner ring of the multi-ring resonator, wherein certain angle difference exists between every two adjacent groups of spokes, the outermost ring of the multi-ring resonator is fixed, and only radial vibration freedom is kept. According to the invention, the outer edge of the multi-ring resonator is fixed, the dispersed electrode is arranged in the center of the ring, and the piezoelectric driving multi-ring gyroscope has the advantages of small volume, stable structure, sensitive response and the like, and has good symmetry and high performance.

Description

technical field [0001] The invention relates to a solid wave mode matching gyroscope in the field of micro-electromechanical technology, in particular to an outer edge fixed piezoelectric-driven multi-ring gyroscope and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptabili...

Claims

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Application Information

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IPC IPC(8): G01C19/5684
CPCG01C19/5684
Inventor 张卫平邢亚亮唐健孙殿竣刘亚东汪濙海陈文元
Owner SHANGHAI JIAO TONG UNIV
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