Apparatus and method of accurately measuring optical lens transmittance in high energy UV laser system

Abstract

The invention discloses an apparatus and method of accurately measuring transmittance of an optical lens to be measured in a high energy UV laser system. A laser light source (1) of the apparatus generates high energy UV pulse laser; a reflection raster (6) receives the pulse laser, performs diffraction beaming on the pulse laser, and takes a strongest level of energy as measuring light, and a second strongest level of energy as reference light; a lens to be measured (3) is placed on a light path of the measuring light; a first energy detector (4) is used for detecting energy of the reference light; and a second energy detector (5) is used for detecting energy of the measuring light. In the method, data when a lens to be measured is put in the energy detector and before the lens to be measured is put in the energy detector are read to calculate a transmittance rate. The apparatus and the method of the invention eliminate influence to optical lens transmittance caused by laser light source energy jitter and splitting ratio jitter caused by splitters, have no requirements for thickness and dimension of the lens to be measured, and can realize accurate and convenient measurement.

Description

technical field [0001] The invention belongs to the technical field of gas laser testing, in particular to a method for accurately measuring the transmittance of optical lenses in a high-energy ultraviolet laser system. Background technique [0002] Optical lenses have many performance indicators, such as aberration, chromatic aberration, imaging quality, etc. Among them, the transmittance is a key reference quantity for reflecting the radiation flux of optical lenses and evaluating the imaging quality, so its measurement is also very important. The factors that affect the transmittance of optical lenses mainly include the reflection and absorption of the lens, and the scattering caused by bubbles and dirt inside the lens. [0003] Most of the previous schemes for testing the transmittance of optical lenses are single-channel measurement methods. This method will cause the radiant flux of the two tests to fluctuate due to the energy fluctuation of the light source itself, wh...

AI Technical Summary

Problems solved by technology

[0006] The present invention aims to solve the problem of effectively eliminating the instability of the light source energy and the splitting ratio jitter of the beam splitter (due to the absorption of the lens substrate and the generation of color centers under the irradiation of high-energy strong light) when the transmittance of the optical lens is tested in the high-energy ultraviolet laser system. Spectral ratio jitter) on the repeatability of measurement results, and the impact on the measurement of transmittance of high transmission lenses

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