Device and method for accurately measuring transmittance of optical lens in high-energy ultraviolet laser system

Abstract

The invention discloses a device and a corresponding method for measuring the transmittance of a lens to be measured in a high-energy ultraviolet laser system. The laser light source (1) of the device generates high-energy ultraviolet pulsed laser light, and a reflective grating (6) receives the pulsed laser light, and The pulsed laser is subjected to diffraction beam splitting, and the level with the strongest energy is taken as the measurement light, and the level with the second strongest energy is used as the reference light, and the lens to be tested (3) is placed on the optical path of the measurement light; the first energy detector ( 4) for detecting the energy of the reference light; the second energy detector (5) is used for detecting the energy of the measuring light. The method of the present invention obtains the transmittance by measuring the readings of each energy detector when the lens to be tested is placed and when it is not placed into the lens to be tested. The invention eliminates the influence of the laser light source energy jitter and the split ratio jitter caused by the splitter sheet on the transmittance measurement of the optical lens, has no requirement on the thickness and size of the lens to be tested, and can realize accurate and convenient measurement.

Description

technical field [0001] The invention belongs to the technical field of gas laser testing, in particular to a method for accurately measuring the transmittance of optical lenses in a high-energy ultraviolet laser system. Background technique [0002] Optical lenses have many performance indicators, such as aberration, chromatic aberration, imaging quality, etc. Among them, the transmittance is a key reference quantity for reflecting the radiation flux of optical lenses and evaluating the imaging quality, so its measurement is also very important. The factors that affect the transmittance of optical lenses mainly include the reflection and absorption of the lens, and the scattering caused by bubbles and dirt inside the lens. [0003] Most of the previous schemes for testing the transmittance of optical lenses are single-channel measurement methods. This method will cause the radiant flux of the two tests to fluctuate due to the energy fluctuation of the light source itself, wh...

AI Technical Summary

Problems solved by technology

[0006] The present invention aims to solve the problem of effectively eliminating the instability of the light source energy and the splitting ratio jitter of the beam splitter (due to the absorption of the lens substrate and the generation of color centers under the irradiation of high-energy strong light) when the transmittance of the optical lens is tested in the high-energy ultraviolet laser system. Spectral ratio jitter) on the repeatability of measurement results, and the impact on the measurement of transmittance of high transmission lenses

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