Process kit, assembly and method for treating a coated substrate
A coating layer and process technology, applied in the field of the process box of the substrate, can solve the problems of interruption, wear and unsealing of the maintenance work of the production chain, and achieve the effect of avoiding wear and tear.
Active Publication Date: 2018-02-06
(CNBM) BENGBU DESIGN & RES INST FOR GLASS IND CO LTD
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Problems solved by technology
Furthermore, it has been shown in practice that technically complex and relatively expensive components, which are designed for the vacuum-tightness of the process chamber, are transported to higher maximum temperatures of more than 500° C. subject to significantly increased wear due to the heating on the corrosive process environment and can become leaky
In the event of a failure, the entire production chain is interrupted by necessary maintenance work
Method used
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[0053] The figures illustrate a process cassette positioned horizontally in a typical working position. It is understood that the process cassettes can also be oriented differently and that the positions and orientations indicated in the ensuing description refer only to the representation of the process cassettes in the figures, without the invention being restricted thereby.
[0054] first observe figure 1 and 2 , which shows a general sectional view of a process box 1 according to the invention for processing a coated substrate 2 ( figure 1 ) and a perspective view of such a process box 1 with end closures 9 ( figure 2 ). The process box 1 is used for the treatment of a substrate 2 coated on one side, for example for the thermal treatment of precursor layers for conversion into compound semiconductors, in particular chalcopyrite compounds. Although only a single substrate 2 is shown, the process box 1 can also be used for processing two or more substrates 2 .
[0055]...
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The invention relates to a process box for processing coated substrates, which has the following features: a gas-tightly closable housing, which forms a cavity; the housing comprises at least one housing section, which is configured as The substrate is heat treatable by electromagnetic heat radiation impinging on the housing section; the housing has at least one housing section and at least one non-coolable housing section that can be coupled with a cooling device for its cooling; The cavity is divided by at least one partition wall into a treatment chamber for receiving the substrate and an intermediate chamber, wherein the partition wall has one or more openings and is arranged between the substrate and the temperature-regulated housing section; the housing has At least one sealable gas feedthrough into the cavity is used for evacuation and for introducing process gas into the cavity. Furthermore, it relates to an assembly and a method for processing coated substrates, in which at least one housing section of a process box is cooled during and / or after the heat treatment and is prevented by a partition wall provided with one or more openings. The gaseous substances produced during the heat treatment diffuse into the tempered housing section, the partition wall being arranged between the matrix of the coating and the tempered housing section.
Description
technical field [0001] The present invention relates to a process box, an assembly and a method for processing coated substrates. It relates in particular to the treatment of substrates coated with precursor layers for the production of absorbers made of compound semiconductors for thin-film solar cells. Background technique [0002] Photovoltaic layer systems for the direct conversion of sunlight into electrical energy are well known. These are often referred to as "solar cells", wherein the term "thin-film solar cells" refers to layer systems with relatively small thicknesses of only a few micrometers, which require a matrix for sufficient mechanical strength. Known substrates include mineral glass, plastics (polymers) or metals, especially metal alloys, and can be designed as rigid plates or flexible films, depending on the respective layer thicknesses and specific material properties. [0003] Thin-film solar cells with absorbers made of compound semiconductors have pr...
Claims
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IPC IPC(8): H01L21/673
CPCH01L21/67353H01L21/67393B05C5/001B05D1/60
Inventor J.帕尔姆M.费尔芬格S.乔斯特
Owner (CNBM) BENGBU DESIGN & RES INST FOR GLASS IND CO LTD