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Solder distribution of semiconductor device heat radiation module

A technology for heat dissipation modules and semiconductors, which is applied in semiconductor devices, semiconductor/solid-state device components, electric solid-state devices, etc., and can solve problems such as chip short circuit and short circuit.

Active Publication Date: 2015-10-07
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the above-mentioned problem that the solder bulges easily caused by the heat sink and the tube core during the sintering process, and climbs to the tube core to cause a short circuit or light blocking of the tube core, the present invention provides a solder distribution structure for a heat dissipation module of a semiconductor device. It can effectively guide the solder to flow toward the heat sink during sintering, prevent the solder from cooling into a ball after cooling down, and climb to the die to cause light blocking and chip short circuit, effectively solving the problem of short circuit or short circuit in the sintering process of existing semiconductor devices The problem of light blocking improves the yield, reliability and stability of the device

Method used

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  • Solder distribution of semiconductor device heat radiation module
  • Solder distribution of semiconductor device heat radiation module
  • Solder distribution of semiconductor device heat radiation module

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Embodiment Construction

[0018] The improved solder distribution structure of the semiconductor device provided by the present invention provides a specific implementation mode. Taking a semiconductor laser as an example, indium is used as solder and sintered on a copper heat sink, including:

[0019] S1 cleans the copper heat sink (6), thereby removing the copper oxide on the surface of the copper heat sink (6), and rinses it with deionized water after cleaning;

[0020] S2 places the cleaned copper heat sink (6) on the evaporation table, and evaporates a layer of gold on the surface of the copper heat sink (6);

[0021] S3 places the copper heat sink (6) with a gold layer evaporated on its surface in the indium plating solution, and uses an electrochemical method to place a die on the gold-plated copper heat sink (6) while evaporating a layer of the first indium layer ( 12);

[0022] S4 According to the electrochemical method described in S3 above, use a specific fixture to vapor-deposit a second i...

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PUM

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Abstract

The invention provides a solder distribution structure of a semiconductor device heat radiation module. The structure comprises a heat sink, a first solder layer, a second solder layer and a chip. The first solder layer is arranged on the heat sink. The second solder layer is arranged at the side surface of the heat sink and connected with the first solder layer. The chip is arranged on the first solder layer and has a top and bottom electrode structure. One second solder layer is also grown on one side surface of the heat sink, and the main effect of the second solder layer is to guide the hunched first solder layer to flow to one side of the heat sink in the sintering process so that climbing of the first solder layer to a tube core direction can be effectively prevented, a problem of short circuit of the tube core or light shielding due to the fact that the first solder layer climbs to the tube core direction can be effectively prevented, and thus yield rate, reliability and stability of the device can be enhanced.

Description

technical field [0001] The invention relates to solder distribution of a heat dissipation module of a semiconductor device, belongs to the field of semiconductor device manufacturing, and relates to a preparation process of a heat dissipation module of a semiconductor device. Background technique [0002] Semiconductor devices refer to discrete devices made of semiconductor materials. According to different semiconductor materials, different processes and geometric structures, researchers have developed a variety of semiconductor devices with different functions. These semiconductor devices are widely used in information storage, communication, military and medical fields. This requires semiconductor devices to have the characteristics of excellent performance, small size, light weight and low power consumption. In order to achieve the above goals, very high requirements are put forward for the manufacturing process of the semiconductor device heat dissipation module. [...

Claims

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Application Information

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IPC IPC(8): H01L23/367
CPCH01L2224/48091H01L2924/00014
Inventor 崔碧峰李莎黄欣竹孔真真
Owner BEIJING UNIV OF TECH
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