Ultraviolet spectrometer spectral resolution detection device and method

Abstract

The invention provides an ultraviolet spectrometer spectral resolution detection device and method. The detection device comprises a light source, a monochrometer, a relay optical system, a vacuum translation stage, a vacuum cabin, a vibration isolation stage and a platform. The light source, the monochrometer and the vacuum cabin are arranged on the vibration isolation stage. The platform is arranged in the vacuum cabin of a vacuum system, and the support column of the bottom part of the platform stretches out of the vacuum cabin to be fixedly connected with the vibration isolation stage outside the vacuum cabin so as to ensure that the light source outside the vacuum cabin, the optical devices of the monochrometer, the relay optical system in the cabin and the optical devices of a tested ultraviolet spectrometer are fixed on the same vibration isolation stage basis. The support column is wrapped in the vacuum cabin via a corrugated pipe so that a vacuum environment is formed in the vacuum cabin. The relay optical system and the vacuum translation stage are arranged on the platform in the vacuum cabin, and the tested ultraviolet spectrometer is arranged on the vacuum translation stage so that the relay optical system and the tested ultraviolet spectrometer are enabled to be arranged in the vacuum environment. Resolution of the tested ultraviolet spectrometer is calculated according to the detected convergent light wavelength, energy full width at half maximum and focal plane line dispersion parameters.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and relates to a detection device and method for the spectral resolution of a vacuum ultraviolet spectrometer. Background technique [0002] The vacuum ultraviolet spectrometer decomposes the vacuum ultraviolet light into spectra, and it is necessary to detect the resolution of the dispersion direction of the ultraviolet spectrometer and the spectral line position of the calibration spectrum. Ordinary spectrometers do not need to be tested in a vacuum, and can be tested by using a monochromator to provide a beam of specified wavelength. To obtain the spectral resolution of the ultraviolet spectrometer, it is necessary to obtain the wavelength λ of the monochromatic light used for detection Focal Line Dispersion Δλ L And the energy half maximum width FWHM (mm) of the point spread function PSF (Point Spread Function). The spectral resolution of the ultraviolet spectrometer is equal ...

AI Technical Summary

Problems solved by technology

[0008] In order to solve the existing problems in the prior art that ultraviolet light propagation requires a vacuum environment and the reflection efficiency is low, the focal ratio of the light source is smaller than that of the measured ultraviolet spectrometer, the monochromatic light source is not ideal in the continuity of the spectral line width and wavelength of the light provided, and the optical To detect technical problems that are easily affected by vibration, the purpose of the present invention is to provide a detection device and method for the spectral resolution of an ultraviolet spectrometer

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