On-chip parameter coplanar waveguide TRL calibration piece

Abstract

The present invention discloses an on-chip parameter coplanar waveguide TRL calibration piece, relating to the technical field of a terahertz on-piece S parameter testing device. The calibration piece comprises a substrate layer. The material of the substrate layer is same with the substrate material of a tested piece. The upper surface of the substrate layer is provided with a direct access standard part, a reflection standard part and a transmission line standard part. The lower surface of the substrate is covered by a metal layer. The ground lines of the direct access standard part, the reflection standard part and the transmission line standard part go through the through holes of the substrate layer respectively to be connected to the metal layer. The probe end of the ground lines of the direct access standard part, the reflection standard part and the transmission line standard part are provided with an alignment marker. The calibration piece has the advantages of high calibration accuracy and simple operation, an error brought by de-embedding is avoided, and a device characteristic can be accurately represented.

Description

technical field [0001] The invention relates to the technical field of terahertz on-chip S-parameter testing devices, in particular to an on-chip S-parameter coplanar waveguide TRL calibrator. Background technique [0002] Terahertz wave is also called submillimeter wave, its strict definition refers to the frequency range of 300GHz-3000GHz, and the wavelength range is 1mm-0.1μm. Compared with microwave and millimeter waves, terahertz waves have the advantages of high frequency, good safety, and strong perspective ability, and have very attractive application prospects in imaging, radar, communication, spectrum, radio astronomy and other fields. [0003] At present, the working frequency of InP PHEMT has reached the terahertz frequency band. As the operating frequency becomes higher and higher, the on-chip small signal scattering parameter (S-parameter) test for wafer-level devices of InP PHEMTs puts forward higher and higher requirements. On-chip testing of small-signal S...

AI Technical Summary

Problems solved by technology

However, the current commercial small-signal S-parameter test calibration kits are mainly based on the millimeter-wave frequency band, and the calibration error caused by the difference between the calibration kit and the substrate material of the device under test (DUT) cannot meet the test requirements of the terahertz frequency band.

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