Mini-type precise in-situ nano impression and scratching testing device

Abstract

The invention relates to a mini-type precise in-situ nano impression and scratching testing device. The mini-type precise in-situ nano impression and scratching testing device comprises macro adjusting mechanisms, a precise pressing-in unit, a load and displacement signal detection unit and a scratch driving unit, wherein an x-directional macro adjusting mechanism is mounted on a substrate; a y-directional macro adjusting mechanism is mounted on an x-directional slide platform; the precise pressing-in unit is mounted on a y-directional slide platform of the y-directional macro adjusting mechanism; a force sensor and y-directional packaging piezoelectric ceramic are mounted at the front end and the inner part of a y-directional flexible hinge respectively; a displacement signal is detected by using the packaging piezoelectric ceramic; a pressing-in load is measured by the force sensor; precise driving is realized by the y-directional packaging piezoelectric ceramic and a pressing-in displacement is measured; a test piece is heated by a silicon nitride heating element so that an impression load displacement curve at a high temperature is obtained; precise scratching driving is realized through z-directional packaging piezoelectric ceramic; and deformation and damage conditions of a material at the high temperature can be observed in real time through heating the test piece by the silicon nitride heating element.

Description

technical field [0001] The invention relates to a precision scientific instrument of mechatronics, in particular to a miniature and precise in-situ nano-indentation and scoring test device integrating macro and micro drives, high-precision detection, micro-nano mechanical property detection and in-situ observation. Background technique [0002] The in-situ nanoindentation and scratch test technology is more difficult than the off-site nanoindentation and scratch test technology, mainly because the miniaturization of the test device is required and the test performance is guaranteed. Miniaturization puts forward requirements for the drive and detection unit of the test device. The drive and detection unit that can be used in many off-site nanoindentation and scratch test devices cannot realize the miniaturization of the device due to their large volume, so a novel drive is required. And detection methods and ingenious structural design to develop a compact test device. At pr...

AI Technical Summary

Problems solved by technology

Miniaturization puts forward requirements for the drive and detection unit of the test device. The drive and detection unit that can be used in many off-site nanoindentation and scratch test devices cannot realize the miniaturization of the device due to their large volume, so a novel drive is required. and detection methods as well as ingenious structural design to develop compact test devices

At present, there is no micro-testing machine in China that can realize precise in-situ nano-indentation and scratch testing of materials in a heating environment. The present invention can realize precise in-situ nano-indentation and scratch testing of materials in a scanning electron microscope (SEM) cavity. Scratch test is a major breakthrough in this field in China

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