A kind of ray polarization device and polarization method of electret with high aspect ratio structure

Abstract

The invention discloses a device and method for polarizing electrets with high-aspect-ratio structures based on rays. The device comprises a protection box, a ray generator, a probe station module and a high-voltage bias power supply, wherein a space between the surfaces of two electrets to be polarized in a ray covering area is filled with high-density plasma; a high-voltage bias electric field is formed between the surfaces, connected to a high voltage end and a grounded end, of the two electrets to be polarized; and positive charges and negative charges in the plasma are separated under the action of the bias high-voltage electric field and move along opposite directions, so that charges of specific electric properties are adsorbed on the surfaces of the two electrets to be polarized. Through adoption of the device and method for polarizing the electrets with high-aspect-ratio structures based on rays, a vacuum environment is not needed; the structure is simple; rapidness and high efficiency are realized; and polarization for the electrets with the high-aspect-ratio structures is realized. Meanwhile, rays can penetrate through a conventional packaging housing, so that the polarization method is not influenced by a packaging process, and the polarization time can be shortened from 5-20 minutes of conventional corona poling to the magnitude of 10 seconds.

Description

technical field [0001] The invention relates to electret polarization, in particular to a ray polarization device and a polarization method for an electret with a high aspect ratio structure. Background technique [0002] Electrets include electret substrates and polarized charges on their surfaces. Polarization technology is the only way to achieve high-density charges for electrets. It plays a decisive role in the performance of electret MEMS and is the primary key technology for research on electret MEMS. Experts and scholars at home and abroad have carried out extensive research on the polarization technology of electrets. The existing classic electret polarization method is corona polarization, which uses the air high-voltage arc discharge mechanism, but the ions generated by corona discharge cannot polarize the electret with high aspect ratio structure due to the charge "aggregation" effect. body; at the same time, corona polarization cannot penetrate the blocked sol...

AI Technical Summary

Problems solved by technology

The existing classic electret polarization method is corona polarization, which uses the air high-voltage arc discharge mechanism, but the ions generated by corona discharge cannot polarize the electret with high aspect ratio structure due to the charge "aggregation" effect. body; at the same time, corona polarization cannot penetrate the blocked solid medium, so it is impossible to polarize the encapsulated electret

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