Variable temperature gas inflation system and control method for sapphire single crystal furnace

Abstract

The present invention discloses a variable temperature gas inflation system and a control method for a sapphire single crystal furnace. The system comprises a furnace body, the furnace body is provided with a variable temperature gas loop; a plurality of pores are located on the variable temperature gas loop; the variable temperature gas loop is connected to a gas feed pipe; one end of the gas feed pipe extends out of the furnace body and is connected to a gas heater; and the gas inlet end of the gas heater is connected to an intake pipe. The purpose of the present invention is to overcome the shortcomings of the prior art; and the provided variable temperature gas inflation system for sapphire single crystal furnace is simple in structure and easy to use, and can effectively prevent the cold cracking of crystal or stress. Another purpose of the invention is to provide a method for controlling cooling of the sapphire single crystal furnace by using the variable temperature gas inflation system for sapphire single crystal furnace.

Description

technical field [0001] The invention relates to a variable temperature gas charging system for a sapphire single crystal furnace, and also relates to a method for controlling the cooling of a sapphire single crystal furnace by using the variable temperature gas charging system for a sapphire single crystal furnace. Background technique [0002] The physical and chemical properties of sapphire crystal α-Al2O3 are extremely superior, and there are many characteristics that other materials cannot match, such as high melting point, high hardness, corrosion resistance, and high optical transmittance. Due to these advantages, a large number of mobile phone and tablet manufacturers have begun to use sapphire as the screen of their products, so the demand for sapphire crystals has increased significantly in recent years. Another important use of sapphire is for LED chip substrates. LED is a new generation of lighting source. With its characteristics of energy saving, environmental p...

AI Technical Summary

Problems solved by technology

Without the gas filling process, the heat dissipation of the crystal is extremely slow, and it only relies on radiation heat dissipation. Because the furnace is a vacuum environment, the entire growth cycle is too long, and the cooling process may take several days, resulting in a great waste of manpower and equipment.

If it is inflated, the temperature of the gas will be too low relative to the furnace, which will cause the crystal to crack or cause a lot of stress

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