Extrinsic fiber Fabry-Perot acceleration sensor based on 45-degree fiber and processing method thereof

A technology of acceleration sensor and processing method, which is applied in the direction of using inertial force for acceleration measurement, etc., can solve the problems of poor stability of coaxial extrinsic fiber optic Fibonacci cavity acceleration sensor, etc., and achieves a reduction in size and cavity length. Effect

Active Publication Date: 2015-11-25
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] In view of the above problems, the present invention discloses an extrinsic optical fiber FAP acceleration sensor based on a 45° optical fiber, and discloses the processing method of the sensor. The acceleration sensor can not only meet the technical requirements of being attached to the surface of the measured object , and can solve the problem of poor stability of the coaxial extrinsic fiber optic FAP cavity acceleration sensor

Method used

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  • Extrinsic fiber Fabry-Perot acceleration sensor based on 45-degree fiber and processing method thereof
  • Extrinsic fiber Fabry-Perot acceleration sensor based on 45-degree fiber and processing method thereof

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specific Embodiment 1

[0036] This embodiment is a device embodiment of an extrinsic fiber-optic FAP acceleration sensor based on a 45° optical fiber.

[0037] The extrinsic fiber-optic FAPP acceleration sensor based on the 45° optical fiber of the present embodiment has a structural schematic diagram as figure 1 shown. The sensor includes a silicon support structure 1, an optical fiber 2 with a polished end face of 45° inserted from the side of the silicon support structure 1 against the bottom, a quality block 3 arranged on the top of the silicon support structure 1, the silicon support structure 1 and the mass The block 3 constitutes a enamel cavity; the mass block 3 is thick in the middle and thin around, and the lower surface of the mass block 3 is coated with a reflective film.

specific Embodiment 2

[0038] This embodiment is a device embodiment of an extrinsic fiber-optic FAP acceleration sensor based on a 45° optical fiber.

[0039] The extrinsic fiber-optic FAP acceleration sensor based on 45° optical fiber in this embodiment, on the basis of the specific embodiment 1, further defines that a circular protrusion is arranged in the middle of the proof mass 3 . It is set as a circular protrusion, so that its vibration has isotropic characteristics, which is beneficial to improve the repeatability of measurement results.

specific Embodiment 3

[0040] This embodiment is an embodiment of the processing method of the extrinsic optical fiber FPP acceleration sensor based on the 45° optical fiber.

[0041] The processing method of the extrinsic fiber optic FAPP acceleration sensor based on the 45° optical fiber, the process flow chart is as follows figure 2 shown. The method includes the following steps:

[0042] Step a, processing the silicon support structure 1 provided with the optical fiber socket;

[0043] Step b, processing the quality block 3 coated with a reflective film on the lower surface;

[0044] The steps a and b are carried out synchronously or in any order;

[0045] Step c, bonding the top of the silicon support structure 1 to the surface of the mass block 3 coated with a reflective film;

[0046] Step d, insert the optical fiber 2 from the optical fiber socket, and adjust the polished end surface of the optical fiber 2 to form an angle of 45° with the bottom surface of the silicon support structure ...

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Abstract

The invention discloses an extrinsic fiber Fabry-Perot acceleration sensor based on a 45-degree fiber and a processing method thereof and belongs to the technical field of an acceleration sensor. The sensor comprises a silicon support structure, the fiber, which is inserted from one side surface of the silicon support structure in a manner of attaching to the bottom and the polishing end surface of which is 45 degrees, and a quality block arranged on the top portion of the silicon support structure, wherein the silicon support structure and the quality block form a Fabry-Perot cavity. The quality block is of a structure which is thick in the middle and thin in the periphery; and the lower surface of the quality block is plated with a reflection film. The method is characterized by, to begin with, processing the silicon support structure and the quality block, the lower surface of which is plated with the reflection film; then, bonding the top end of the silicon support structure with the surface, plated with the reflection film, of the quality block; inserting the fiber from a fiber inserting port and adjusting the fiber; and finally, sealing the fiber inserting port. The technical demand for being used in the manner of attaching to the surface of a tested object can be met, and the problem of poor stability of a coaxial extrinsic fiber Fabry-Perot acceleration sensor can be solved.

Description

technical field [0001] The invention relates to an extrinsic optical fiber FAP acceleration sensor and a processing method based on a 45° optical fiber, belonging to the technical field of acceleration sensors. Background technique [0002] In the fields of aerospace, military ships, biomedicine, and construction, it is necessary to measure acceleration, and the measurement of acceleration is inseparable from the acceleration sensor. As an important part of the acceleration sensor, the fiber optic sensor has been developed rapidly. [0003] At present, common fiber optic sensors include fiber optic accelerometers based on ring cavity interferometers, fiber optic accelerometers based on Michelson interferometers, fiber optic accelerometers based on Mach-Zehnder interferometers, fiber optic accelerometers based on fiber Bragg gratings, based on Optical fiber accelerometer with intrinsic fiber optic cavity, etc. The common feature of these sensors is that the optical fiber is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/03
Inventor 金鹏王健林杰刘欢
Owner HARBIN INST OF TECH
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