Contact resistance measuring method and structure

Abstract

The invention provides a contact resistance measuring method and structure used for measuring contact resistance between a probe and a welding pad in a hot carrier injection experiment. The method includes steps of arranging a resistor R between two adjacent welding pads; applying a voltage V on the two adjacent welding pads and measuring the corresponding first current I; calculating the total resistance between the two adjacent welding pads according the first voltage V and the first current I; applying a second current I' on a welding pad adjacent to the two adjacent welding pads and measuring a second voltage V' corresponding to the resistor R; calculating the magnitude of the resistor R according to the second voltage V' and the second current I'; and calculating the magnitude of the contact resistor according to the total resistance and the magnitude of the resistor R. By adopting the measuring method provided by the invention, the magnitude of the contact resistance is calculated by utilizing difference values, so that measurement time and measurement samples can be saved and an aim of reducing working cost can be realized.

Description

technical field [0001] The application relates to the field of resistance testing, in particular to a testing method and testing structure of contact resistance. Background technique [0002] The hot carrier injection experiment in the prior art is a very time-consuming primary reliability experiment. In this experiment, the contact between the probe and the gasket has a great influence on the experiment and the final result. When the contact of the probe is not reliable, the parameters of the electrical signal obtained in the experiment will change accordingly. Whether the probe and its corresponding pad are in reliable contact can be judged by the contact resistance between the probe and its corresponding pad. [0003] Disadvantages in the prior art: Since the contact resistance between the probe and the corresponding pad is very small, the contact between the probe and the corresponding pad is not reliable, and the corresponding contact resistance is correspondingly smal...

AI Technical Summary

Problems solved by technology

[0003] Disadvantages in the prior art: Since the contact resistance between the probe and its corresponding pad is very small, the contact between the probe and the corresponding pad is not reliable, and the corresponding contact resistance is correspondingly small

This makes it necessary for the staff to spend a lot of time and samples for repeated testing when it is necessary to detect the contact resistance of the probe in the prior art to obtain more accurate experimental data, resulting in higher work costs

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