System and method for automatically releasing WAT PM probe card

A probe card, automatic technology, used in electrical components, circuits, semiconductor/solid-state device testing/measurement, etc., can solve problems affecting PM probe card release efficiency, etc., to improve the ratio of usable time and improve work efficiency , the effect of reducing the release time

Active Publication Date: 2015-11-25
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] When inspecting acceptance indicators, due to the large number of items to be inspected, it takes a lot of time to record the inspection data results into the corresponding record form and modify them (for example, it takes 5 PM probe cards to release 4 PM probe cards at one time. Hours, of which data recording and modification will take 2 hours), which affects the efficiency of PM probe card release (release)

Method used

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  • System and method for automatically releasing WAT PM probe card
  • System and method for automatically releasing WAT PM probe card

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Embodiment Construction

[0028] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0029] In the following specific embodiments of the present invention, please refer to figure 1 , figure 1 It is a schematic diagram of a system for automatically releasing WATPM probe cards in a preferred embodiment of the present invention. Such as figure 1 As shown, for the WATPM probe card, WAT engineers need to check various acceptance inspection items. The WAT engineer checks the acceptance data, which may include, for example, the firmness of the RFID (radio frequency identification), the integrity of the base, leakage (leakage), needle tip diameter, proberangle (probe angle), etc.

[0030] The existing method is to record the checked data results in the corresponding record form after all the indicators to be checked are qualified, and then send mail (mail) to notify MFG (manufacturing engineer) that the card can be used....

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Abstract

The invention discloses a system and method for automatically releasing a WAT PM probe card. Through establishing a system for automatically releasing the WAT PM probe card, a data inspection result of the PM probe card can be grabbed in real time for storing in a database, whether the probe card is released is determined according to a set value of each acceptance inspection item, after each inspection accords with a specification value, the system can automatically switch the state of the PM probe card, and a release instruction is emitted through an internal mail. According to the invention, the work efficiency can be effectively improved, the release time of the PM probe card is reduced, at the same time, the workload and the work time of an engineer is are also decreased, and the ratio of available time of the probe card is enhanced in the long run.

Description

technical field [0001] The invention relates to the application field of semiconductor microelectronics testing, and more specifically, to a system and method for automatically releasing WATPM probe cards. Background technique [0002] After the semiconductor wafer is manufactured and before packaging, in order to ensure the yield of the wafer and avoid packaging waste, a wafer acceptance test (Wafer Acceptance Test, WAT) is required in the semiconductor manufacturing process. The WAT probe card machine is one of the important tools widely used in the electrical measurement of the wafer, and it is the test interface connecting the WAT measuring instrument and the wafer. Its working principle is to directly contact the probe of the probe card (ProbeCard) connected to the measuring instrument with the test pad (PAD) or bump electrode on the chip to be tested to form a measurement circuit, and feed the probe to the chip to be tested. The test signal and feedback chip signal ar...

Claims

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Application Information

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IPC IPC(8): H01L21/66
CPCH01L22/14H01L22/30
Inventor 赵朝珍周波
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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