Flow speed change rate sensing structure based on flexoelectric effect and measuring method thereof
A flexoelectric effect and rate-of-change technology, applied in the field of measurement, can solve the problems of small effective components and environmental threats, and achieve the effects of small measurement structure, good real-time performance and wide application range
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[0037] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0038] As shown in the accompanying drawings, a sensing structure based on the flow rate change rate of the flexoelectric effect of the present invention includes insulating layers 1 on the upper and lower sides, and a plurality of laminated units located between the insulating layers 1, each laminated unit includes The electrode layers 2 on the upper and lower sides, the flexoelectric material layer 3 located between the electrode layers 2, the length and width of the flexoelectric material layer 3 are slightly smaller than the electrode layer 2, and the electrode layer 2 is relatively larger than the flexoelectric material layer 3 The protruding part is filled with insulating viscous material 4 to play the role of bonding and insulation. The protruding part of the insulating layer 1 relative to the electrode layer 2 is filled with in...
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