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A three-degree-of-freedom micro-displacement adjustment device for an optical element

A technology for adjusting devices and optical components, which is applied in the direction of optical components, optics, installation, etc., can solve the problems of low adjustment accuracy and high processing difficulty, and achieve the effects of reduced processing difficulty, large carrying capacity, and reasonable design

Active Publication Date: 2017-04-26
BEIJING GUOWANG OPTICAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In view of this, the purpose of the present invention is to provide a three-degree-of-freedom micro-displacement adjustment device for optical elements, so as to at least solve the problems of low adjustment accuracy and high processing difficulty in previous adjustment devices.

Method used

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  • A three-degree-of-freedom micro-displacement adjustment device for an optical element
  • A three-degree-of-freedom micro-displacement adjustment device for an optical element
  • A three-degree-of-freedom micro-displacement adjustment device for an optical element

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Embodiment 1

[0064] Such as figure 1 and figure 2 As shown, a three-degree-of-freedom micro-displacement adjustment device for optical elements includes a lens barrel 1, and three drivers 8 are installed on the outer wall of the lens barrel 1 at equal intervals of 120°, and each driver 8 is fixed by four sixth screws 7 On the driver mounting surface 1-4 of the lens barrel 1, the outside and inside of the push rod 19 are respectively connected to the driver 8 and the flexible guide mechanism 1-3, and the driver 8 pushes the flexible guide mechanism 1-3 to move in the XY plane through the push rod 19 . Three groups of flexible guiding mechanisms 1-3 are arranged on the inner side of the lens barrel 1 at equal intervals of 120°, and each group of flexible guiding mechanisms 1-3 is equivalent to a mobile P hinge, which is connected with a three-degree-of-freedom UR to adjust the bottom of the branch chain 6 The end faces 6-9 are connected by three eighth screws 18, thus forming a PUR branch...

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Abstract

The invention discloses a three-degree-of-freedom micro-displacement adjustment device for an optical element, comprising: a lens barrel (1), a lens frame (2) used for placing the optical element, and a three-dimensional lens respectively connected to the lens barrel (1) and the lens frame (2). Degree of freedom adjustment device, the three-degree-of-freedom adjustment device can drive the lens frame (2) to move relative to the lens barrel (1) along the three degrees of freedom of X, Y, and Z to achieve the purpose of adjusting the displacement of optical elements; the displacement adjustment device has a structure Simple, reasonable design, high adjustment accuracy, convenient processing and other advantages.

Description

technical field [0001] The invention relates to the technical field of lithographic projection objective lens manufacturing, and in particular provides a three-degree-of-freedom micro-displacement adjustment device for an optical element. Background technique [0002] The lithography projection objective lens is the key equipment in the ultra-large / very large-scale integrated circuit manufacturing process. In recent years, with the continuous reduction of the line width of the integrated circuit, the resolution of the lithography projection objective lens has gradually improved. The continuous improvement of the overall performance of optical equipment requires that the projection objective lens has a higher numerical aperture (NA) and smaller system wave aberration. Axial and eccentric adjustment devices used for index compensation such as magnification, field curvature, astigmatism, and spherical aberration are one of the main means of optical system performance compensati...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/00
CPCG02B7/00
Inventor 张德福李显凌倪明阳隋永新杨怀江
Owner BEIJING GUOWANG OPTICAL TECH CO LTD