High-purity krypton/xenon gas purification device and manufacturing method, and manufacturing method of getter

Abstract

The invention discloses a purification device of high-purity krypton / xenon gas. The purification device comprises reaction tubes, a hydrogen adsorber, a cooler, a precision filter and product storage equipment which are sequentially connected, wherein the reaction tubes are located in heaters, gas reaction sections are arranged in the reaction tubes, stainless steel screen layers are arranged at two ends of each gas reaction section, space between the stainless steel screen layers is filled with a getter, and the getter is a hollow cylinder with one closed end. The invention further provides a method for preparing the high-purity krypton / xenon gas by adopting the purification device and a preparation method of the getter applied to the purification device of the high-purity krypton / xenon gas.

Description

technical field [0001] The invention relates to the technical field of gas purification, in particular to a high-purity krypton / xenon gas purification device and a method for producing high-purity krypton / xenon gas using the purification device, and also relates to a high-purity krypton / xenon gas purification device How the getter is made. Background technique [0002] Aiming at the problem that the 1995 national standards for krypton and xenon cannot meet the needs of the high-end photoelectric market and the development of modern science and technology, the industry revised the national standards "Krypton" (GB / T5829-2006) and "Xenon" (GB / T5828-2006) . Compared with the old national standards for krypton and xenon in 1995, the 2006 version of the new national standard for krypton and xenon has stricter quality requirements for products, adding new control standards for impurities such as hydrocarbons, carbon monoxide, carbon dioxide and fluorocarbons, and improving Contro...

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Problems solved by technology

[0003] Although the quality of krypton / xenon gas produced by the original krypton / xenon purification device can meet the requirements of the 1995 national standard, it cannot meet the purity requirements of the 2006 new national standard for high-purity krypton / xenon (99.999%)

At the same time, in the past 10 years, my country's atmospheric environmental pollution has intensified, the air quality of the raw material gas of the air separation system has declined, and the content of fluorocarbons and oxygen nitrogen compounds has gradually increased. The content of fluorocarbons has increased from 20-50ppm to 150-220ppm. The device has many problems such as insufficient processing capacity, high loss, easy clogging, and short service life. The service life has been shortened from the original 1.5-2 years to 3-6 months. , and when the getter in the high-temperature reaction zone on the inlet side of the U-shaped tube fails and is blocked, the getter in the sub-high temperature reaction zone on the outlet side has not failed, but the U-shaped reaction tube can only be replaced as a whole, and the expensive getter can be used very inadequate

[0004] In response to the above shortcomings, the company invested a lot of energy in research and development of a new type of purification device. Although this new type of purification device can produce high-purity krypton and xenon gas products with a purity of 99.999% required by the 2006 version of the new national standard, in the actual operation process, After the above-mentioned new purification device worked for 6 months, the reaction tube was seriously blocked, and the reaction tube had to be replaced, which did not reach the expected life of 1.5 years.

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