Flexible organic film capacitive sensor capable of sensing humidity and gas simultaneously and manufacturing method thereof

Abstract

The invention provides a flexible organic film capacitive sensor capable of sensing humidity and gas simultaneously and a manufacturing method thereof. The structure of the flexible organic film capacitive sensor is shown in the figure 1. The sensor comprises a substrate (1), a lower electrode (2), a humidity sensitive layer (3), a gas sensitive layer (4), two dielectric layers (501 and 502) and two upper electrodes (601 and 602). In the sensor, the substrate is made of PET, the lower electrode is made of ITO, the humidity sensitive layer is made of polyimide or polymethyl methacrylate, the gas sensitive layer is made of propyl group-trimethoxy silane or 3-diethyl aminopropyl-trimethoxy silane, the dielectric layers are made of insulated organic materials and located on the two sides of the gas sensitive layer with the middle exposed outside, and the two upper electrodes are made of metal gold and located on the two dielectric layers respectively.

Description

【Technical field】 [0001] The invention belongs to the field of organic electronic sensors, in particular to a flexible organic film capacitive sensor capable of simultaneously sensing humidity and gas and a manufacturing method thereof. 【Background technique】 [0002] Humidity sensors and gas sensors have a wide range of applications. Most of the relatively mature humidity sensors now use the resistance detection method. However, the accuracy of this sensor is not high, and it is easily affected by other conditions. In recent years, many capacitive sensors have been proposed, but most of them use rigid materials, which cannot cover well when measuring uneven or curved surfaces. As a film form, the flexible organic film capacitive sensor can be large or small, so that it can not only detect the humidity or gas concentration at a precise position, but also can be attached to the surface of an object for large-scale detection when it is made into a large area. detection, and i...

AI Technical Summary

Problems solved by technology

[0002] Humidity sensors and gas sensors have a wide range of applications. Most of the relatively mature humidity sensors use resistance detection. However, the accuracy of this sensor is not high and it is easily affected by other conditions.

In recent years, many capacitive sensors have been proposed, but most of them use rigid materials, which cannot cover well when measuring uneven or curved surfaces.

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