Substrate etching method
A technology of substrate and main etching, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of energy loss, small proportion of process time, and enhanced particle bombardment ability, so as to improve the height and enhance ion Bombardment energy, the effect of increasing the etching selectivity ratio
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0041] In order for those skilled in the art to better understand the technical solution of the present invention, the substrate etching method provided by the present invention will be described in detail below in conjunction with the accompanying drawings.
[0042]The substrate etching method provided by the embodiment of the present invention adopts the existing plasma processing equipment to carry out the etching process. Preferably, the plasma processing equipment can be an inductively coupled plasma equipment, which mainly includes a reaction chamber, an induction coil, an upper RF system and lower RF system. Wherein, a carrying device for carrying the substrate is provided in the reaction chamber, such as a base, a mechanical chuck or an electrostatic chuck, and the like. Moreover, a temperature control device is also provided in the reaction chamber to adjust the temperature of the substrate. In addition, during the etching process, helium gas is delivered to the gap ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com