Apparatus for achieving in-situ micromechanics, microstructure and component integrated research in scanning electron microscope

Abstract

An apparatus for achieving in-situ micromechanics, microstructure and component integrated research in a scanning electron microscope belongs to the field of material microstructure and performance in-situ characterization. According to the apparatus, a double trapezoid leading screw transmission system is adopted, thus the apparatus is large in rigidity and high in test precision; the apparatus can stably operate in the scanning electron microscope, has low mechanical noise, and has low interference on scanning electron microscope imaging; the trapezoid leading screw has a self-locking function, thus the test can be paused and started at any time, continuity of test data is good; a sample clamp has a rotation function, thus when material extension/compression mechanical properties are measured, scanning electron beam imaging, EDS and EBSD integrated test can be satisfied at the same micro area; clamp support frames designed by the apparatus, the sample clamps and samples have the completely symmetrical structure, thus the samples receive the completely symmetrical extension/compression stress, and a geometric center of the sample, i.e., a deformation center, is located right under an electron beam all the time, thereby facilitating in-situ tracking dynamic research and high-quality microscopic scanning image acquisition.

Description

Technical field: [0001] The invention relates to a device for in-situ micromechanics, microstructure and component integration research in a scanning electron microscope, which belongs to the field of in-situ characterization of material microstructure and performance. Background technique [0002] Regardless of whether it is a functional material or a structural material, the microstructure and composition information that make up these materials are the decisive factors that determine the physical and mechanical properties of the material. However, for a long time, the measurement of mechanical properties of materials and the characterization of microstructure and composition distribution have been carried out independently. Even though there are a few mechanical experiments that can be carried out under diffraction conditions such as X-rays and synchrotron radiation, there is still a lack of in-situ, real-time, real-space high-resolution microstructural image information....

AI Technical Summary

Problems solved by technology

It is not compatible with scanning electron microscope EDS energy spectrometer and EBSD diffractometer to simultaneously collect signals for the crystal structure information of components in the same micro region

As a result, many important characterization parameters related to microstructure and mechanical properties: such as the crystallographic orientation evolut...

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