Base inspection device and method for FOUP (Front Opening Unified Pod)

Abstract

The present invention provides a base inspection device and method for an FOUP (Front Opening Unified Pod). The base inspection device comprises an image acquisition unit, a locking assembly and a processing unit; wherein the processing unit is electrically connected with the image acquisition unit and the locking assembly; the image acquisition unit is movably arranged at the lower side of a base, so as to acquire an opening image of at least one opening. The image acquisition unit acquires the image of the opening through control of the processing unit, and judges whether each opening contains a screw element therein. The locking assembly is adjacent to the image acquisition unit and is movably arranged at the lower side of the base. When each opening contains the screw element therein, the locking assembly inspects whether each screw element is locked through control of the processing unit.

Description

technical field [0001] The present invention relates to a base inspection device and method of a Front Opening Unified Pod (FOUP), in particular to a device and method capable of inspecting the locking status of a plurality of screw parts on the base of a Front Opening Unified Pod. Background technique [0002] In semiconductor manufacturing processes, wafers are usually placed in a wafer transfer pod (FOUP) for handling or storage. The wafer transfer box has a chamber and a base, in which the chamber is used to isolate the wafer from the environment around the wafer frame to avoid contamination of the wafer, and is fixed on the wafer loader (LoadPortUnit, LPU) through the base on the stage. The base is usually provided with a plurality of threaded holes, so that the base and the chamber can be fixed to each other by using a plurality of threaded parts. [0003] In the prior art, manual work is still used to fix the base to the bottom of the chamber by means of screws. Si...

AI Technical Summary

Problems solved by technology

If the operator misuses the wrench, the threaded parts may not be locked

During the process of the FOUP being transported, the unlocked screw parts may loosen, which may cause the failure of the transporting equipment

[0004] In addition, operators can only visually or manually confirm whether each threaded part has been locked.

However, due to the large number of threaded holes, it is quite cumbersome and inconvenient for operators to confirm whether each threaded part has been locked one by one.

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