cryopump

Abstract

The invention provides a low-temperature pump. The low-temperature pump comprises a pump body, a self-lubricating system and a motor. The self-lubricating system is arranged in the pump body and comprises a main runner, a bearing branch, a main shaft branch, a first branch, a second branch and a third branch which are communicated with one another, wherein the first branch, the second branch and the third branch extend from the main shaft branch. The main runner is formed by sequentially communicating an inlet of a shell, a runner formed by the shell and an impeller and a lubricating groove of a rear cover, wherein all the branches are communicated. Compared with the correlation technology, according to the low-temperature pump, the self-lubricating system is arranged in the pump body and comprises multiple pipelines, multiple components in the pump body can be self-lubricated, the design of the boosting impeller is adopted, the lubricating effect of the self-lubricating system can be improved, normal operation of all components in the pump body is guaranteed, the working efficiency of the low-temperature pump is improved, and the service life of the low-temperature pump is prolonged.

Description

technical field

[0001] The invention relates to the technical field of pumps, in particular to a cryogenic pump. Background technique

[0002] A cryopump is a vacuum pump that captures gas molecules on a cryopanel cooled to an ultra-low temperature by condensation or adsorption and exhausts them. It is widely used in the research and production of semiconductors and integrated circuits, as well as molecular beam research, vacuum coating equipment, and vacuum surfaces. Analytical instruments, ion implanters and space simulation devices and other fields.

[0003] The working temperature of the pump body of the cryopump is generally lower than minus one hundred degrees Celsius. According to the working environment of the pump body of the cryopump, each component needs to be fully lubricated to work normally. If the lubrication is not in place, parts will fail. Thus affecting the normal operation of the cryopump and bringing great cost to maintenance. In related technologies, ...

Images