Device and method for improving diffusion uniformity of solar cell
A solar cell, uniformity technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problems of high dispersion of intra-chip diffusion resistance, uneven resistance between diffusion cells, and large dispersion of square resistance between wafers. , to achieve the effect of improving the diffusion uniformity of solar cells, improving the diffusion uniformity and high controllability
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0026] A method for improving the diffusion uniformity of a solar cell, the specific steps of the manufacturing method are as follows:
[0027] (a): Place the air intake pipe 6 with the same length as 3 below the quartz boat 3, the opening 9 provided on the air intake pipe 6 faces the bottom of the diffusion quartz tube 1, and the open end 61 of the air intake pipe 6 is connected to the air pump , the closed end 62 of the air inlet pipe 6 is placed in the diffusion quartz tube 1, the side wall of the closed end 62 has a hole and the hole faces the furnace door 2;
[0028] (b): Fix an exhaust pipe 7 with both ends open above the quartz boat 3 in the diffusion quartz tube 1, place one end of the exhaust pipe 7 in the diffusion quartz tube 1, and place the other end of the exhaust pipe 7 Placed outside the diffusion quartz tube 1;
[0029] (d): Turn on the air pump and exhaust device, the opening 9 on the inlet pipe 6 starts to output gas to the bottom of the diffusion quartz tu...
Embodiment 2
[0033] A method for improving the diffusion uniformity of a solar cell, the specific steps of the manufacturing method are as follows:
[0034] (a): Place 5 intake pipes 6 with different lengths under the quartz boat 3, the opening 9 provided on the intake pipe 6 faces the bottom of the diffusion quartz tube 1, and the open end 61 of the intake pipe 6 is in contact with the air pump Connected, the closed end 62 of the intake pipe 6 is placed in the diffusion quartz tube 1, the side wall of the closed end 62 has a hole and the hole faces the furnace door 2;
[0035] (b): Fix an exhaust pipe 7 with both ends open above the quartz boat 3 in the diffusion quartz tube 1, place one end of the exhaust pipe 7 in the diffusion quartz tube 1, and place the other end of the exhaust pipe 7 Placed outside the diffusion quartz tube 1;
[0036] (d): Turn on the air pump and exhaust device, the opening 9 on the inlet pipe 6 starts to output gas to the bottom of the diffusion quartz tube 1, a...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 