Multi-iron-heterogeneous magnetic field sensor adjustable in measuring range and measuring range adjusting method

Abstract

The invention discloses a multi-iron-heterogeneous magnetic field sensor adjustable in measuring range and a measuring range adjusting method. The magnetic field sensor comprises a bottom metal electrode layer, a free layer, an isolation layer, a pinning layer and a top metal electrode layer which are arranged from bottom to top in sequence. The free layer is of a multi-iron-heterogeneous multi-layer structure and comprises a ferroelectric layer and a first ferromagnetic layer from bottom to top in sequence. The pinning layer is of a multi-layer structure and comprises a second ferromagnetic layer and a reverse ferromagnetic layer from bottom to top in sequence. A ferroelectric stress axis direction of the free layer is perpendicular to a magnetic moment direction of the pinning layer in horizontal projection. The measuring range adjusting method comprise the steps that: a measuring range switching voltage V is applied to the ferroelectric layer of the magnetic field sensor, the ferroelectric layer is enabled to generated an electric field stress, the first ferromagnetic layer is under the effect of the electric field stress, and a saturated magnetic field is changed, so that the measuring range of the magnetic field sensor is changed. The invention provides the multi-iron-heterogeneous magnetic field sensor simple in structure, small in size and convenient and flexible, and the measurement precision of the sensor in a low magnetic field is ensured.

Description

Technical field [0001] The invention relates to the field of magnetic field sensors, in particular to a multi-iron heterogeneous magnetic field sensor with an adjustable range and a range adjustment method. Background technique [0002] Magnetic field sensors are widely used in magnetic fields and measurement systems that can be converted into magnetic fields, including the measurement of physical parameters such as magnetic field strength, current, displacement, direction, and rotation speed. The measurement span of the magnetic field involved in life is large. For example, biomagnetic signals are usually on the order of nT to μT, the signal magnitude of the geomagnetic field is about 0.01mT, and the magnitude of conventional electromagnetic equipment reaches mT. Among existing magnetic field sensor technologies, magnetoresistive magnetic field sensors play an important role in the field of magnetic field sensors due to their advantages of high sensitivity, small size, and low p...

AI Technical Summary

Problems solved by technology

[0004] However, in the existing technology, the measurement range of the above-mentioned magnetic tunnel junction and giant magnetoresistance magnetic field sensor is determined by the saturation magnetic field of the ferromagnetic layer of the magnetic field sensor, which usually depends on the material and the processing technology of the device, and it cannot be similar in actual use. Compared with other types of magnetic field sensors, the range is controlled and replaced according to specific needs to achieve the best measurement requirements

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