Multi-iron-heterogeneous magnetic field sensor adjustable in measuring range and measuring range adjusting method

A magnetic field sensor and variable adjustment technology, applied in the field of magnetic field sensors, can solve problems such as the inability of magnetic field sensors, and achieve the effects of ensuring accuracy, simple structure, and expanding the magnetic field measurement range.

Active Publication Date: 2016-05-11
NAT UNIV OF DEFENSE TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in the existing technology, the measurement range of the above-mentioned magnetic tunnel junction and giant magnetoresistance magnetic field sensor is determined by the saturation magnetic field of the ferromagnetic layer of the magnetic field sensor, which usu

Method used

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  • Multi-iron-heterogeneous magnetic field sensor adjustable in measuring range and measuring range adjusting method
  • Multi-iron-heterogeneous magnetic field sensor adjustable in measuring range and measuring range adjusting method
  • Multi-iron-heterogeneous magnetic field sensor adjustable in measuring range and measuring range adjusting method

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Embodiment 1

[0034] Such as figure 1 As shown, a multi-iron heterogeneous magnetic field sensor with adjustable range of the present invention includes a bottom metal electrode layer 1, a free layer 2, an isolation layer 3, a pinning layer 4, and a top metal electrode layer 5 arranged in sequence from bottom to top; The free layer 2 is a multi-iron heterogeneous multilayer structure, from bottom to top, there are ferroelectric layer 21 and the first ferromagnetic layer 22; the pinning layer 4 is a multilayer structure, from bottom to top, there are the second ferromagnetic layer 41 and Antiferromagnetic layer 42; the direction of the ferroelectric stress axis of the free layer 2 is perpendicular to the direction of the magnetic moment of the pinned layer 4 in the horizontal projection. In this embodiment, the ferroelectric stress axis direction of the free layer 2 is the horizontal direction of the paper surface, the magnetic moment direction of the pinned layer 4 is perpendicular to the pa...

Embodiment 2

[0065] Such as figure 2 As shown, the multiferro heterogeneous magnetic field sensor with adjustable range in this embodiment is basically the same as that of Embodiment 1, except that the ferroelectric layer 21 is a thin film structure of ferroelectric material, or a thin film structure of piezoelectric material, or Multi-ferro material film structure; there is a support layer 6 below the bottom metal electrode layer 1, which is used to support the layers of the magnetic field sensor. The range adjustment method of the multi-iron heterogeneous magnetic field sensor of this embodiment is the same as that of the first embodiment.

Embodiment 3

[0067] Such as image 3 As shown, the multi-ferro heterogeneous magnetic field sensor with adjustable range in this embodiment is basically the same as that in Embodiment 2, except that the ferroelectric layer 21 is a thin film structure of ferroelectric material, or a thin film structure of piezoelectric material, or Multi-ferro material film structure; there is a support layer 6 above the top metal electrode layer 5, which is used to support the layers of the magnetic field sensor. The range adjustment method of the multi-iron heterogeneous magnetic field sensor of this embodiment is the same as that of the first embodiment.

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Abstract

The invention discloses a multi-iron-heterogeneous magnetic field sensor adjustable in measuring range and a measuring range adjusting method. The magnetic field sensor comprises a bottom metal electrode layer, a free layer, an isolation layer, a pinning layer and a top metal electrode layer which are arranged from bottom to top in sequence. The free layer is of a multi-iron-heterogeneous multi-layer structure and comprises a ferroelectric layer and a first ferromagnetic layer from bottom to top in sequence. The pinning layer is of a multi-layer structure and comprises a second ferromagnetic layer and a reverse ferromagnetic layer from bottom to top in sequence. A ferroelectric stress axis direction of the free layer is perpendicular to a magnetic moment direction of the pinning layer in horizontal projection. The measuring range adjusting method comprise the steps that: a measuring range switching voltage V is applied to the ferroelectric layer of the magnetic field sensor, the ferroelectric layer is enabled to generated an electric field stress, the first ferromagnetic layer is under the effect of the electric field stress, and a saturated magnetic field is changed, so that the measuring range of the magnetic field sensor is changed. The invention provides the multi-iron-heterogeneous magnetic field sensor simple in structure, small in size and convenient and flexible, and the measurement precision of the sensor in a low magnetic field is ensured.

Description

Technical field [0001] The invention relates to the field of magnetic field sensors, in particular to a multi-iron heterogeneous magnetic field sensor with an adjustable range and a range adjustment method. Background technique [0002] Magnetic field sensors are widely used in magnetic fields and measurement systems that can be converted into magnetic fields, including the measurement of physical parameters such as magnetic field strength, current, displacement, direction, and rotation speed. The measurement span of the magnetic field involved in life is large. For example, biomagnetic signals are usually on the order of nT to μT, the signal magnitude of the geomagnetic field is about 0.01mT, and the magnitude of conventional electromagnetic equipment reaches mT. Among existing magnetic field sensor technologies, magnetoresistive magnetic field sensors play an important role in the field of magnetic field sensors due to their advantages of high sensitivity, small size, and low p...

Claims

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Application Information

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IPC IPC(8): G01R33/09G01R33/00
CPCG01R33/0023G01R33/093
Inventor 李裴森潘孟春赵建强陈棣湘田武刚胡佳飞张琦
Owner NAT UNIV OF DEFENSE TECH
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