Macro and micro dual-driving precise wedged feeding worktable and motion generation method

Abstract

The invention discloses a macro and micro dual-driving precise wedged feeding worktable and a motion generation method, and belongs to the field of numerical control processing. The worktable adopts a dual-driving mode of linear motors and piezoelectric transducers, and comprises X-direction and Y-direction linear motors, X-direction and Y-direction reading heads, grating rulers, wedged blocks, a moving plate, a Y-direction slide block, a worktable panel, a connecting plate, the piezoelectric transducers, support rods and a clamping worktable. The X-direction linear motor drives the wedged blocks to move to separatelygenerate X-direction and Z-direction precise high-travel motions; the Y-direction linear motor generates a Y-direction precise high-travel motion; and the piezoelectric transducers drive a parallel flexible hinge structure on the working panel to generate precise micro-travel motions in X, Y and Z directions and micro-rotation around X and Y directions. The worktable can be used for installing workpiecesorcutter devicesto generate precise feeding motions, is fast in response, high in precision, high in travel and high in displacement resolution, and can be directly integrated with a numerical control machine tool for auxiliary precise processing.

Description

technical field [0001] The invention relates to a macro-micro dual-drive precision wedge feed workbench and a motion generating method, belonging to the field of numerical control processing. Background technique [0002] The high-precision and high-resolution ultra-precision feed mechanism plays an extremely important role in the field of ultra-precision machining. It is an important factor to ensure the dimensional machining accuracy of parts and a necessary means to achieve precision and ultra-precision machining. The feed table involved in the current ultra-precision machining generally adopts a single drive mode in the form of a linear motor, a ball screw plus a servo motor, or a piezoelectric ceramic. These single drive forms cannot simultaneously meet the actual needs of high precision and large stroke. . For this reason, the high precision and large stroke of the worktable are realized by using the dual drive of macro and micro, but there are the following problems:...

AI Technical Summary

Problems solved by technology

[0003] (1) A drive source corresponding to the direction of motion is required in each direction of motion, resulting in a certain amount of economic waste; (2) In the design of the micro-displacement drive structure, the coupling can be eliminated by using a series flexible hinge structure, but the disadvantage is the work efficiency It is not high and needs to be adjusted one by one. The parallel design of the flexible hinge structure is more efficient than the series design. The disadvantage is that the coupling is very serious; (3) The macro and micro drive structure design mainly realizes the feed movement in the two-dimensional direction, and the two-dimensional and above Processing is difficult to meet processing requirements

Images