A kind of processing method of complex three-dimensional structure microchannel
A three-dimensional structure and micro-channel technology, applied in the directions of micro-structure technology, micro-structure device, manufacturing micro-structure device, etc., can solve the problem of inability to form complex three-dimensional structure channels, and achieve the effect of low cost and large promotion space.
Active Publication Date: 2017-03-08
GUANGDONG UNIV OF TECH
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[0006] The invention provides a processing method of a complex three-dimensional structure microchannel, and its purpose is to overcome the problem in the prior art that a regular complex three-dimensional structure channel cannot be formed on silicon or III-V semiconductor materials
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[0033] By changing the direction of the reaction vessel in the centrifuge, the contact position between the metal particle catalyst and the silicon or III-V semiconductor material can be controlled, thereby changing the etching direction, forming such as Figure 5 (a) shows the z-shaped microchannel and Figure 5 (b) The 3D structure of the complex channel shown.
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The invention discloses a complex three-dimensional-structure micro-channel machining method. By taking metal particles as a catalyst, according to a three-dimensional micro-channel structure needed to be formed, orientation and rotation speed of a machined part are changed through an external mechanical force, so that a contact position and a motion direction of the metal particle catalyst and the machined part are controlled; the machined part is etched under the action of a mixed solution of hydrofluoric acid and an oxidizing agent, so that the needed complex three-dimensional-structure micro-channel is machined. The complex three-dimensional-structure micro-channel machining method avoids the conventional thought, smartly and simply implements the manufacturing of the three-dimensional-structure micro-channel by depending on the external mechanical force with low costs, and is suitable for any regular complex three-dimensional-structure micro-channels; additionally, the method can be suitable for micro-fluidic chips, biological chips and microelectronic devices, can be applied to large-batch production and has a larger promotion space.
Description
technical field [0001] The invention relates to a processing method of a complex three-dimensional microchannel. Background technique [0002] Microchannels widely exist in microfluidic chips, biochips and microelectronic devices, and are often used in various important applications such as controlling various types of chemical reactions, screening abnormal cells, genetic testing, and electrical channels. However, due to the needs of functions such as precise detection and control of reactions, microchannels are often three-dimensional structures with relatively complex shapes, and the requirements for the shape of the microchannel and the quality of the channel surface are also extremely high. For modern ultra-precision processing technology, processing complex three-dimensional microchannels on chips less than 1mm is already a huge challenge, and the processing quality cannot be guaranteed. [0003] As shown in Figure 1, the simplest three-dimensional special-shaped micro...
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IPC IPC(8): B81C1/00
CPCB81C1/005
Inventor 陈云陈新高健张昱汪正平高波贺云波杨志军
Owner GUANGDONG UNIV OF TECH