A structure for preventing thermocouples from being corroded or blown in a high-pressure single crystal furnace

Abstract

The invention discloses a structure for preventing a thermocouple in a high-pressure single crystal furnace from being corroded or fused and relates to the field of preparation of semiconductor materials. The structure comprises a heater, a crucible, a crucible support, an upper crucible bar, the crucible and the crucible support are disposed in a heat field of a heater, the upper crucible bar is disposed at the bottom of the crucible support and is of hollow structure, the lower end of the crucible bar is provided with a sealing structure, a hollow chamber of the upper crucible bar forms a sealed chamber, and the thermocouple passes through the sealing structure so that a measuring end of the thermocouple is located at the inner top of the sealed chamber of the upper crucible bar; also provided with a hollow lower crucible bar, and an upper port of the lower crucible bar is in detachable fixed connection with a lower port of the upper crucible bar. The structure is effective in preventing corrosive or volatile gas from permeating the chamber of the upper crucible bar under high-temperature and high-pressure condition, preventing the measuring end alloy probe of the thermocouple being corroded or being fused due to melting point reduction caused by reaction with permeating gas, ensuring accurate feedback and display of temperature in the whole synthetic and crystal growth process, and increasing crystal material yield.

Description

technical field [0001] The invention relates to the technical field of semiconductor material preparation, in particular to a structure for preventing thermocouples from being corroded or blown in a high-pressure single crystal furnace. Background technique [0002] Crystal materials occupy an increasingly high proportion in modern industrial applications, and thermal field control has an important impact on the quality and yield of crystal synthesis and growth. And through the precise feedback of thermocouples, the heating power can be adjusted in time to form a good thermal field and produce a reasonable temperature gradient, so that crystal materials with small residual stress, low dislocation density and excellent electrical parameters can be grown. Therefore, it is very important to configure the optimal thermal field and monitor the thermal field in real time. [0003] The detection thermocouple penetrates from the hollow lower crucible rod to the top of the hollow up...

AI Technical Summary

Problems solved by technology

The measurement performance is greatly reduced, and the temperature feedback during the subsequent crystal growth process cannot be completed, so that the operator cannot control and operate the thermal field in the high-pressure single crystal furnace, which seriously affects the yield of crystal growth

It may even cause temperature out of control, which may cause serious safety hazards

I have tried armored thermocouple protection, that is, a protective cap is sheathed at the probe of the thermocouple measuring end, but the protective cap has a certain degree of heat insulation, which greatly reduces the temperature feedback accuracy of the thermocouple measuring end, making the temperature during synthesis and crystal growth The regulation is more complex, which also affects the process operation and the yield of crystal materials

And because the armored thermocouple is protected by the overall sheath, when the thermocouple is damaged, the thermocouple wire in the protective sheath cannot be replaced, and the whole set can only be updated, which is cumbersome to operate and greatly increases the cost

Therefore, this method is not suitable for synthesis and crystal growth processes that require precise temperature measurement.

Moreover, no other armoring method has been found to be suitable for this process.

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