Photo-thermal deflection spectrum detection device and detection method

A technology of spectral detection and photothermal deflection, applied in the field of spectral detection, can solve the problem of insufficient detection sensitivity, and achieve the effect of improving detection sensitivity

Active Publication Date: 2016-07-06
安徽中科春谷激光产业技术研究院有限公司
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Problems solved by technology

[0004] The existing technology of detecting thin films by photothermal

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  • Photo-thermal deflection spectrum detection device and detection method
  • Photo-thermal deflection spectrum detection device and detection method

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Embodiment Construction

[0024] The present invention will be further described through the embodiments below in conjunction with the accompanying drawings, so as to better understand the present invention.

[0025] The structure of the photothermal deflection spectrum detection device of the present invention is as follows figure 1 with figure 2 shown. The detection device of the present invention includes a pump laser 1, a detection laser 8, a detection cavity 7, an optical position detector 9, a beam splitter 2, a light intensity detector 3, a chopper 6, an amplifier module 10, and an A / D conversion module 5 and computer host 4, amplifier module 10 is made up of preamplifier 10-1 and lock-in amplifier 10-2; figure 2 shown as figure 1 The specific structure of the detection cavity 7 in the detection cavity 7 is provided with a focusing lens 7-1, a sample stage 7-2, a front reflector 7-3 and a rear reflector 7-4; an optical position detector 9 and a rear reflector An optical filter (not shown i...

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Abstract

The invention discloses a photo-thermal deflection spectrum detection device and detection method. The detection device mainly comprises a pump laser, a detection laser, a detection cavity, an optical position detector and devices for signal modulation, amplification and collection analysis. The method comprises steps of irradiating the pump light to a film to be detected during the detection, forming a refractive index gradient in a medium in the proximity after the film to be detected absorbs the pump light and produces a heating effect, irradiating the detection light to an area having refractive index gradient above the film to be detected, and using an optical position detector to detect the light deflection amount after the light passes through the area. The detection device of the invention is provided with two parallel reflectors on the detection optical path inside the detection cavity, the detection light which is deflected inside the detection cavity is oscillated between two reflectors, and the detection light repeatedly passes through the medium area having the refractive index gradient, which enables the detection light to increase the deflection angle and improve the sensitivity of the photothermal deflection spectroscopy.

Description

technical field [0001] The invention belongs to the technical field of spectrum detection, and in particular relates to a photothermal deflection spectrum detection device, which is especially suitable for optical thin film detection. The invention also relates to a photothermal deflection spectrum detection method. Background technique [0002] Optical film is an indispensable basic component in the optical system. Its performance affects the performance of the entire optical system. A large part of its damage comes from film absorption. Therefore, the study of optical film absorption loss is very important for the study of film damage mechanism. . [0003] At present, photothermal technologies such as laser calorimetry and photothermal deflection technology have been successfully applied to the field of weak absorption measurement of optical thin films. The existing photothermal deflection spectroscopy detection technology usually irradiates a beam of pump light that can...

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Application Information

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IPC IPC(8): G01J3/28G01J3/02
CPCG01J3/0208G01J3/28
Inventor 王欢
Owner 安徽中科春谷激光产业技术研究院有限公司
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