High-sensitivity pressure sensor and manufacturing method thereof
A high-sensitivity, manufacturing method technology, applied in the high-sensitivity pressure sensor and its manufacturing field, can solve the problems of complex manufacturing process, high cost, long manufacturing cycle, etc., and achieve the effects of simple manufacturing process, short manufacturing cycle and low cost
Inactive Publication Date: 2016-07-06
SHANGHAI JIAO TONG UNIV +1
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However, the production process of the existing methods is too complicated, generally requires a heating process and a vacuum environment, the production cycle is long, and the required materials are various and the cost is high.
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[0029] figure 1 It is a pressure sensor device diagram of a preferred embodiment of the present invention. As can be seen from the figure, a pressure sensor device 1 based on a polymer network structure proposed by the present invention includes a pressure sensor layer 10, a conductive Electrode layers 110 and 111, substrate layers 120 and 121. The conductive electrode layers 110 and 111 are respectively on the upper and lower surfaces of the pressure sensor layer 10 , and the substrate layers 120 and 121 are respectively on the upper and lower surfaces of the conductive electrode layers 110 and 111 . The conductive electrode layers 110 and 111 can be made of the same material, or can be made of different materials, can be flexible materials, or can be hard materials. The substrate layers 120 and 121 may be made of the same material, or different materials, and may be flexible materials or hard materials. In this embodiment, the materials of the conductive electrode layers 1...
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The invention discloses a high-sensitivity pressure sensor based on a polymer network structure and a manufacturing method thereof. The high-sensitivity pressure sensor comprises the polymer network structure and conductive particles. The polymer network structure has certain elasticity and can be regular or irregular and acts as a supporting frame to be distributed in the whole sensor space. The conductive particles are evenly inlaid in the polymer network structure. The polymer network structure is enabled to be more compact by applying of external pressure, and mutual contact of the conductive particles is closer so that contact resistance can be reduced, and the size of pressure can be determined by measuring resistance of the sensor. In the manufacturing process of the sensor, a third type of substance is introduced to act as a filler and then is washed through a special method so that elastic modulus can be reduced and sensitivity of the senor can be enhanced. The heating process of vacuum environment is not required, the manufacturing period is short, manufacturing is simple and cost is low so as to be suitable for large-scale popularization.
Description
technical field [0001] The invention relates to a pressure sensor, in particular to a high-sensitivity pressure sensor based on a polymer network structure and a manufacturing method thereof. Background technique [0002] In recent years, pressure sensors, as a new additional technology, have been widely used in various consumer electronic products (such as iPhone6s) and commercial electronic equipment. As a kind of sensor, pressure sensor has been pursuing high sensitivity, and a series of methods have been developed to improve the sensitivity by improving the properties of the matrix elastic material and filling conductive particles. However, the manufacturing process of the existing methods is too complicated, generally requires a heating process and a vacuum environment, the manufacturing cycle is long, and the required materials are various and the cost is high. [0003] Therefore, those skilled in the art are devoting themselves to developing a high-sensitivity pressu...
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IPC IPC(8): G01L1/20
CPCG01L1/205
Inventor 刘诗雨胡德春陆建钢谢汉萍
Owner SHANGHAI JIAO TONG UNIV