Acoustic surface wave gas sensor

Abstract

The invention discloses an acoustic surface wave gas sensor and belongs to the field of gas sensors. A single-ended resonance acoustic surface wave sensor serves as an energy converter. The single-ended resonance acoustic surface wave sensor comprises a piezoelectric substrate, an interdigital transducer, reflecting grates and a preferential adsorption film area, wherein the interdigital transducer is arranged on the piezoelectric substrate; the reflecting grates are arranged on the two sides of the interdigital transducer; the preferential adsorption film area is arranged on the surface of the device and is divided into two symmetrical partitions by taking the symmetrical axis of the interdigital transducer as the symmetrical axis; gas sensitive films having different responses to a same specific gas are deposited in the two partitions. The acoustic surface wave gas sensor provided by the invention can be used for improving the baseline drift phenomenon and increasing the stability and precision of the sensor; the measuring accuracy of the gas sensor can be obviously increased; the acoustic surface wave gas sensor has the advantages of small volume, portability, low energy consumption, and the like; the large-scale production can be realized and the reality requirement can be met.

Description

technical field [0001] The invention belongs to the field of gas sensors, in particular to a surface acoustic wave gas sensor. Background technique [0002] With the development and use of various gases, in order to effectively carry out quality monitoring and gas composition analysis in gas production, air pollution detection in environmental protection, and detection and alarm of gas leakage for civilian use, domestic and foreign researchers have long Committed to researching combustible gas detection and control methods, developing various gas detection and analysis together, used for environmental monitoring, production process monitoring and component analysis, gas leakage alarm, etc. The key component for detecting gas is the gas sensor. A gas sensor is a device that converts information about the type of gas and its concentration into an electrical signal. According to the strength of these electrical signals, information related to the existence of the gas to be me...

AI Technical Summary

Problems solved by technology

One of the existing solutions is to use the characteristics of the gas sensor and use algorithms such as adaptive principal component analysis and neural networks to compensate the baseline of the gas sensor signal, but the algorithm is complex and limits their application in small devices, and It is not convenient for the algorithm to be easily transplanted between different gas sensors

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