Method for fluorinating insulator through use of CF4 plasma
A plasma and insulator technology, which is applied in the field of plasma fluorinated insulators, achieves the effects of simple and fast processing, improved contact angle and low toxicity
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Embodiment 1
[0030] 1) At room temperature, put the pot insulator sample (the main component is epoxy resin) into a closed reaction chamber, and then vacuumize the reactor to a pressure of less than 10 -2 Pa;
[0031] 2) Fill CF into the reaction chamber 4 Mixed gas with argon until the pressure in the cavity reaches 0.1atm, and the concentration of CF4 is 10%;
[0032] 3) Apply high voltage to the electrodes in the reaction chamber to generate plasma and process the insulator sample for 5 minutes;
[0033] 4) After the reaction, the gas in the reaction chamber was fully replaced with nitrogen, and the insulator samples were taken out to test the flashover voltage and surface contact angle.
Embodiment 2
[0035] 1) At room temperature, put the silicone rubber insulator into a closed reaction chamber, and then vacuumize the reactor to a pressure of less than 10 -2 Pa;
[0036] 2) Fill CF into the reaction chamber 4 Mixed gas with argon until the pressure in the cavity reaches 0.1atm, and the concentration of CF4 is 10%;
[0037] 3) Apply high voltage to the electrodes in the reaction chamber to generate plasma and process the insulator sample for 10 minutes;
[0038] 4) After the reaction, the gas in the reaction chamber was fully replaced with nitrogen, and the insulator samples were taken out to test the flashover voltage and surface contact angle.
Embodiment 3
[0040] 1) At room temperature, put the alumina ceramic insulator into a closed reaction chamber, and then vacuumize the reactor to a pressure of less than 10 -2 Pa;
[0041] 2) Fill CF into the reaction chamber 4 Mixed gas with argon until the pressure in the cavity reaches 0.1atm, and the concentration of CF4 is 10%;
[0042] 3) Apply high voltage to the electrodes in the reaction chamber to generate plasma and process the insulator sample for 8 minutes;
[0043] 4) After the reaction, the gas in the reaction chamber was fully replaced with nitrogen, and the insulator samples were taken out to test the flashover voltage and surface contact angle.
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