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A laser-induced breakdown spectroscopy detection device and detection method

A technology of laser-induced breakdown and spectral detection, which is applied in measurement devices, thermal excitation analysis, material excitation analysis, etc., and can solve the problems such as difficult adjustment of the included angle of the laser beam

Inactive Publication Date: 2019-02-15
ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In addition, the Double Pulse Laser Induced Breakdown Spectroscopy (Double Pulse Laser Induced Breakdown Spectroscopy, referred to as DP-LIBS) technology has greatly improved the spectral intensity and detection accuracy compared with SP-LIBS. However, most of the traditional excitation methods are It adopts a fixed orthogonal and coaxial mode, which makes it difficult to adjust the angle between the two laser beams

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  • A laser-induced breakdown spectroscopy detection device and detection method
  • A laser-induced breakdown spectroscopy detection device and detection method

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Experimental program
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Effect test

Embodiment 1

[0055] The computer 2 in the laser-induced breakdown spectrum detection device of the present invention sends a work instruction to the laser light source 3, and the laser light source 3 sends out a high-energy beam with a pulse energy of 20 mJ, a pulse width of 6 ns, a repetition frequency of 10 Hz, and a wavelength of 1064 nm. Laser beam; the laser beam emitted from the laser light source 3 forms an angle of 45° with the beam splitter 4, and the laser beam is divided into two perpendicular laser beams by the beam splitter 4, thereby realizing single beam separation; one of the laser beams passes through the lens 6 Directly focus on the 2mm position in the sample 9 to be tested, the focal length of the lens 6 is 300mm, to realize material pre-ablation, use the dial 8 to set the beam angle of the double-pulse ablation to 30°; another laser beam passes through The lens 5 is focused into the hollow fiber 7 with a diameter of 200 μm and a length of 1 m. The laser transmitted in th...

Embodiment 2

[0058] The computer 2 in the laser-induced breakdown spectrum detection device of the present invention sends work instructions to the laser light source 3, and the laser light source 3 sends out a beam of high-energy pulses with a pulse energy of 20 mJ, a pulse width of 6 ns, a repetition frequency of 10 Hz, and a wavelength of 1064 nm. Laser beam, the high-energy laser beam passes through the beam splitter 4, and the laser beam forms an angle of 45° with the beam splitter, and the laser beam is divided into two perpendicular laser beams by the beam splitter 4, thereby realizing single beam separation; The laser beam is directly focused to the position of 1 mm in the sample 9 to be measured through the lens 6, the focal length of the lens 6 is 100 mm, and the pre-ablation of the material is realized, and the angle between the beams of the double-pulse ablation is set to 75° by using the dial 8; A beam of laser light is focused into the hollow fiber 7 through the lens 5. The di...

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Abstract

The invention discloses a laser-induced breakdown spectrum detection device and a detection method, which include a spectrometer, a computer, a laser light source, a spectroscope, a first lens and a second lens, a hollow optical fiber, a dial, and a spectrometer coupling probe; the computer controls the spectrometer and The work of the laser light source; the spectroscope separates the single beam emitted by the laser light source into two mutually perpendicular laser beams. One beam is focused on the sample under test through the first lens to achieve pre-ablation, and the other laser beam is focused on the sample through the second lens. In the hollow fiber, the sample under test is re-ablated; the dial calibrates the angle between the light beam focused on the sample under test through the first lens and the light beam focused on the hollow fiber through the second lens. The above-mentioned beam angle It can be freely adjusted within a predetermined range; the spectrometer coupling probe couples the laser-induced plasma light and transmits it to the spectrometer. By using the above technical means, free-angle detection is achieved and the intensity of the emission spectral line is improved.

Description

technical field [0001] The invention relates to the fields of optical design and material detection, in particular to a laser-induced breakdown spectrum detection device and detection method. Background technique [0002] Laser Induced Breakdown Spectroscopy (LIBS for short) is a typical emission spectrum analysis method. Due to the good beam quality of the laser, the point of action focused on the material to be tested is extremely small, and the interaction between the laser and the material only occurs on the surface of the material, and the damage is only on the order of microns, so it can be regarded as non-destructive measurement; at the same time, the laser has good Directionality, long-distance measurement and deep-sea detection can be realized by using optical fiber transmission or telescopic system; the industrial smelting site can be directly quantitatively analyzed, so no sample preparation is required. [0003] LIBS technology has the advantages of no need for ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/71G01N21/01
CPCG01N21/01G01N21/718G01N2201/08
Inventor 樊仲维付杰赵天卓郭喜庆连富强刘洋林蔚然貊泽强聂树真肖红常慧
Owner ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI