A metamaterial-based terahertz medical imager and its manufacturing method

Abstract

The invention provides a terahertz medical imager based on metamaterials and a manufacturing method thereof. The imager at least comprises a multi-spectrum large-array terahertz detector based on metamaterials. The terahertz detector comprises a silicon wafer substrate with a cavity, a first dielectric layer formed on the front face of the silicon wafer substrate, a second dielectric layer suspended on the cavity, a metamaterial terahertz harmonic oscillator array suspended on the cavity, and a lead structure formed on the surface of the first dielectric layer and electrically connected with the metamaterial terahertz harmonic oscillator array. The multi-spectrum large-array terahertz detector based on the metamaterials is used for detecting terahertz waves reflected or transmitted from an imaged sample, and object reconstruction is achieved through response signals of the detector. The imager is high in imaging speed, completely harmless to living bodies, high in resolution ratio and capable of achieving real-time structure and function imaging, and is well complementary with an existing mainstream medical imaging method.

Description

technical field [0001] The invention relates to the technical field of medical imaging, in particular to a metamaterial-based terahertz medical imager and a manufacturing method thereof. Background technique [0002] Existing medical imaging methods mainly include CT scanning imaging, magnetic resonance imaging and positron emission tomography imaging, etc. None of these imaging methods is absolutely perfect, and each has its own drawbacks. For example, CT scan imaging uses X-rays, which are harmful to the human body; magnetic resonance imaging is expensive and not suitable for patients with metal objects; positron emission tomography imaging is expensive and uses radioactive substances, which is very harmful to the human body. The energy of terahertz wave photons is very low, 107-108 times weaker than X-ray photons, radiation to biological tissues will not cause any tissue ionization, and is completely harmless to the human body; at the same time, terahertz waves have stron...

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Problems solved by technology

However, the absorption efficiency of infrared detectors to terahertz waves is limited after all, so the response is very poor

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