Thermal mechanical type electromagnetic radiation detector

Abstract

The invention provides a thermal mechanical type electromagnetic radiation detector. The electromagnetic radiation detector is composed of a metamaterial wave absorber, supporting legs and a substrate. The electromagnetic radiation detector is prepared on a transparent substrate through adopting a surface sacrificial layer process, and a suspended movable structure according to which the supporting legs support the metamaterial wave absorber can be formed. In detection imaging, electromagnetic wave energy entering the metamaterial wave absorber is converted into thermal energy, and the supporting legs are bent after temperature changes; a beam of visible light passes through the transparent substrate and enters the reflecting mirror surface of the metamaterial wave absorber; an optical detection system is used for reading the deflection angle change and distribution of the metamaterial wave absorber; and therefore, detection imaging of electromagnetic waves can be realized. The thermal mechanical type electromagnetic radiation detector provided by the invention has the advantages of high sensitivity, high resolution, high reliability, high uniformity, low cost and simple preparation process and the like, can be used as a single detector to work independently, can also be distributed into an array to work as an imaging device, and can be flexibly designed according to the wavelength of detected electromagnetic waves and actual application requirements.

Description

technical field [0001] The invention belongs to the technical field of electromagnetic radiation detection and imaging, and relates to a design and preparation method of a thermomechanical electromagnetic radiation detector, in particular to an optical readout electromagnetic radiation prepared on a transparent substrate and based on a metamaterial absorber detector. Background technique [0002] In general, electromagnetic radiation detectors can be classified into thermal detectors and photon-type detectors according to their detection principles. Photonic detectors are generally made of semiconductor materials, and semiconductor materials with different band gaps are selected according to the wavelength of the detection radiation. The incident electromagnetic wave excites electrons to a high energy level, thereby generating an induced current or causing a change in conductivity. Photonic detectors have obvious advantages in response time and detection sensitivity, and ha...

AI Technical Summary

Problems solved by technology

At present, metamaterial absorbers generally adopt a sandwich structure with an upper resonant structure, an intermediate dielectric layer, and a lower reflector. By using different resonant structures and dielectric layer materials, metamaterial absorbers can achieve selective single-band and multi-band And broadband absorption, however, most studies only focus on the absorption characteristics of metamaterial absorbers, and rarely apply metamaterial absorbers to functional devices

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