Method for producing diamond-like carbon film

A manufacturing method and technology of carbon film, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems affecting the smoothness and time-consuming of the coating process

Inactive Publication Date: 2016-09-14
CREATING NANO TECH INC
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Problems solved by technology

However, in a vacuum, cooling the substrate temperature to the growth temperature required for diamond-like carbon is quite time-consuming, so the coating proc

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  • Method for producing diamond-like carbon film
  • Method for producing diamond-like carbon film

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Embodiment Construction

[0027] In view of the fact that the conventional diamond-like carbon film cannot grow at high temperature, and in a high-temperature application environment, it will deteriorate and cause a sharp drop in hardness, which severely limits the application of the diamond-like carbon film. Therefore, the present invention proposes a method for fabricating a diamond-like carbon film, which uses an aromatic ring hydrocarbon as a precursor for growing the diamond-like carbon film, and can grow the diamond-like carbon film at a high substrate temperature. Utilizing the high carbon-to-hydrogen ratio and benzene ring structure of aromatic ring hydrocarbons, it can still obtain less hydrogen and sp 3 structure (diamond structure) is rich and sp 2 High-hardness diamond-like carbon film with less structure (graphite structure). Moreover, since the hydrogen content in the diamond-like carbon film is small, the amount of hydrogen released by the diamond-like carbon film in a high-temperature ...

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Abstract

A method for producing a diamond-like carbon film is disclosed and comprises the following steps: base material is placed in a reaction chamber, an aromatic ring hydrocarbon is guided into the reaction chamber. The aromatic ring hydrocarbon is used as a reaction precursor, the carbon-like carbon film is grown on the substrate. The step of growing the diamond-like carbon film comprises controlling the temperature of the base material at 200 DEG C to 800 DEG C. Since the aromatic ring hydrocarbon has a benzene ring structure and a high hydrocarbon ratio, a carbon-like carbon film having a high content of sp3 and a low hydrogen content can be obtained when the diamond-like carbon film is grown at a high base material temperature, and the hardness of the diamond-like carbon film can be improved A problem that the diamond-like carbon film decreases in hardness in a high-temperature application environment is solved.

Description

technical field [0001] The present invention relates to a method for manufacturing a thin film, and in particular to a method for manufacturing a diamond-like carbon (DLC) film. Background technique [0002] Diamond-like carbon film is a kind of 2 Bonding with SP 3 Bonded amorphous carbon film with a high content of SP 3 bond. Due to the higher content of SP 3 Bonding, so the diamond-like carbon film has many characteristics similar to diamonds, such as high hardness, high Young's modulus, high electrical resistivity, high thermal conductivity, wide optical transmission range, chemical corrosion resistance and good wear resistance, etc. Moreover, diamond-like carbon film can be formed at low temperature, which is far easier to obtain than diamond. In addition, in terms of mold applications, due to the low friction coefficient, high hardness and high flatness of the diamond-like carbon film, it has advantages in preventing sticking to help demoulding, and improving the l...

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Application Information

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IPC IPC(8): C23C16/26
Inventor 黄世明黄傑杨为翔
Owner CREATING NANO TECH INC
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